CONFERENCE PROCEEDINGS
Advanced Search
Michaela Wentz
at GLOBALFOUNDRIES Inc.
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 16 October 2019 Presentation + Paper
Creating nonideality: enabling cross-platform process matching solutions with MPC (and a lot of hard work)
Charles Whiting, Ingo Bork, Peter Buck, Robin Chia, Bharadwaj Durvasula, Daniel Hill, Gazi Huda, Ken Jantzen, Matthew Leuthold, Jianliang Li, Joerg Mellmann, Kushlendra Mishra, Jed Rankin, Nageswara Rao, Malavika Sharma, Rachit Sharma, Adam Smith, Michaela Wentz
Proceedings Volume 11148, 1114805 (2019) https://doi.org/10.1117/12.2538347
KEYWORDS: Photomasks, Data modeling, Optical proximity correction, Critical dimension metrology, Calibration, Lithography, Semiconducting wafers, Manufacturing, Opacity, Etching
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top