Oshrat Bismuth
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 10 April 2024 Presentation + Paper
Jaesuk Yoon, Jongmin Park, Minjung Shin, Dongchul Ihm, Oshrat Bismuth, Smadar Ferber, Jacob Ofek, Igor Turovets, Isaac Kim
Proceedings Volume 12955, 129551S (2024) https://doi.org/10.1117/12.3010729
KEYWORDS: Semiconducting wafers, 3D metrology, Silicon, Chemical mechanical planarization, Interferometry, Modeling, Scatterometry, Metrology

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