Dr. Peng Su Profile

Dr. Peng Su

Assistant Research Professor, Optical Science at ASML US Inc

SPIE Involvement:

Conference Program Committee | Author

Publications (38)

PROCEEDINGS ARTICLE | September 14, 2018

Model-free optical surface reconstruction from deflectometry data

Proc. SPIE. 10742, Optical Manufacturing and Testing XII

KEYWORDS: Monochromatic aberrations, Metrology, Data modeling, Cameras, Interferometry, Computer generated holography, Deflectometry, Ray tracing, Freeform optics, Systems modeling

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PROCEEDINGS ARTICLE | July 22, 2016

Fabrication and testing of 4.2m off-axis aspheric primary mirror of Daniel K. Inouye Solar Telescope

Proc. SPIE. 9912, Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation II

KEYWORDS: Mirrors, Mirrors, Solar telescopes, Solar telescopes, Metrology, Interferometry, Optical fabrication, Computer generated holography, Bidirectional reflectance transmission function, Aspheric lenses, Off axis mirrors, Surface finishing

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PROCEEDINGS ARTICLE | November 16, 2015

Integrated Ray Tracing (IRT) simulation of SCOTS measurement of GMT fast steering mirror surface

Proc. SPIE. 9575, Optical Manufacturing and Testing XI

KEYWORDS: Mirrors, Scattering, Cameras, Sensors, Error analysis, Computer simulations, Image analysis, Zernike polynomials, Ray tracing, Device simulation

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PROCEEDINGS ARTICLE | August 27, 2015

Deflectometry measurement of Daniel K. Inouye Solar Telescope primary mirror

Proc. SPIE. 9575, Optical Manufacturing and Testing XI

KEYWORDS: Mirrors, Metrology, Imaging systems, Cameras, Calibration, Lens design, Optical testing, Deflectometry, LCDs, Aspheric lenses

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SPIE Journal Paper | August 5, 2015

High-accuracy aspheric x-ray mirror metrology using Software Configurable Optical Test System/deflectometry

Huang, Run , Su, Peng , Burge, James , Huang, Lei , Idir, Mourad

OE Vol. 54 Issue 08

KEYWORDS: Mirrors, Calibration, Cameras, X-ray optics, X-rays, Optical testing, Metrology, Distortion, Aspheric lenses, Monochromatic aberrations

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PROCEEDINGS ARTICLE | September 8, 2014

Aligning and testing non-null optical system with deflectometry

Proc. SPIE. 9195, Optical System Alignment, Tolerancing, and Verification VIII

KEYWORDS: Monochromatic aberrations, Telescopes, Mirrors, Imaging systems, Cameras, Calibration, Wavefronts, Distortion, Optical testing, Deflectometry

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SPIE Journal Paper | August 15, 2014

Optical metrology of a large deformable aspherical mirror using software configurable optical test system

Huang, Run , Su, Peng , Horne, Todd , Brusa, Guido , Burge, James

OE Vol. 53 Issue 08

KEYWORDS: Mirrors, Monochromatic aberrations, Cameras, Beam splitters, Deformable mirrors, LCDs, Optical metrology, Optical testing, Wavefronts, Aspheric lenses

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PROCEEDINGS ARTICLE | August 7, 2014

Production of primary mirror segments for the Giant Magellan Telescope

Proc. SPIE. 9151, Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation

KEYWORDS: Monochromatic aberrations, Telescopes, Mirrors, Polishing, Sensors, Image segmentation, Wavefronts, Optical testing, Active optics, Surface finishing

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PROCEEDINGS ARTICLE | July 28, 2014

Measuring large mirrors using SCOTS: the Software Configurable Optical Test System

Proc. SPIE. 9151, Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation

KEYWORDS: Mirrors, Modulation, Imaging systems, Cameras, Calibration, Interferometry, Optical testing, Deflectometry, Aspheric lenses, Light

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PROCEEDINGS ARTICLE | July 22, 2014

Development of a wide field spherical aberration corrector for the Hobby Eberly Telescope: design, fabrication and alignment

Proc. SPIE. 9145, Ground-based and Airborne Telescopes V

KEYWORDS: Monochromatic aberrations, Telescopes, Mirrors, Optical fabrication, Optical testing, Computer generated holography, Aspheric optics, Optical alignment, Optical instrument design, Tolerancing

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PROCEEDINGS ARTICLE | December 19, 2013

Study of the instrument transfer function of a free-form optics metrology system: SCOTS

Proc. SPIE. 9046, 2013 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems

KEYWORDS: Point spread functions, Mirrors, Metrology, Imaging systems, Spatial frequencies, Cameras, X-rays, Interferometry, Deflectometry, Modulation transfer functions

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SPIE Journal Paper | December 2, 2013

Aspheric and freeform surfaces metrology with software configurable optical test system: a computerized reverse Hartmann test

Su, Peng , Khreishi, Manal , Su, Tianquan , Huang, Run , Dominguez, Margaret , Maldonado, Alejandro , Butel, Guillaume , Wang, Yuhao , Parks, Robert , Burge, James

OE Vol. 53 Issue 03

KEYWORDS: Cameras, Mirrors, Calibration, Aspheric lenses, Optical testing, Interferometry, Freeform optics, Metrology, Deflectometry, Imaging systems

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PROCEEDINGS ARTICLE | September 27, 2013

X-ray mirror metrology using SCOTS/deflectometry

Proc. SPIE. 8848, Advances in X-Ray/EUV Optics and Components VIII

KEYWORDS: Mirrors, X-ray optics, Metrology, Imaging systems, Cameras, Calibration, X-rays, Optical testing, LCDs, Spherical lenses

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PROCEEDINGS ARTICLE | September 7, 2013

Measurement of a large deformable aspherical mirror using SCOTS (Software Configurable Optical Test System)

Proc. SPIE. 8838, Optical Manufacturing and Testing X

KEYWORDS: Observatories, Monochromatic aberrations, Mirrors, Beam splitters, Imaging systems, Cameras, Deformable mirrors, Optical testing, LCDs, Aspheric lenses

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PROCEEDINGS ARTICLE | September 7, 2013

Subaperture stitching performance estimation

Proc. SPIE. 8838, Optical Manufacturing and Testing X

KEYWORDS: Calibration, Error analysis, Ions, Fourier transforms, Chromium, Computer simulations, Optical testing, Monte Carlo methods, Neodymium, Yield improvement

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PROCEEDINGS ARTICLE | May 13, 2013

Precision aspheric optics testing with SCOTS: a deflectometry approach

Proc. SPIE. 8788, Optical Measurement Systems for Industrial Inspection VIII

KEYWORDS: Mirrors, Cameras, Sensors, Calibration, Interferometry, Optical testing, Deflectometry, Aspheric optics, Spherical lenses, Large Synoptic Survey Telescope

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PROCEEDINGS ARTICLE | October 25, 2012

Optical testing for meter size aspheric optics

Proc. SPIE. 8466, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI

KEYWORDS: Mirrors, Sensors, Interferometry, Wavefronts, Optical testing, Computer generated holography, Aspheric optics, Aspheric lenses, System on a chip, Surface finishing

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PROCEEDINGS ARTICLE | September 13, 2012

SCOTS: a reverse Hartmann test with high dynamic range for Giant Magellan Telescope primary mirror segments

Proc. SPIE. 8450, Modern Technologies in Space- and Ground-based Telescopes and Instrumentation II

KEYWORDS: Telescopes, Mirrors, Optical spheres, Reflection, Imaging systems, Cameras, Calibration, Interferometry, Optical testing, Surface finishing

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PROCEEDINGS ARTICLE | September 13, 2012

Production of 8.4m segments for the Giant Magellan Telescope

Proc. SPIE. 8450, Modern Technologies in Space- and Ground-based Telescopes and Instrumentation II

KEYWORDS: Telescopes, Mirrors, Polishing, Interferometers, Image segmentation, Glasses, Wavefronts, Computer generated holography, Aspheric lenses, Surface finishing

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PROCEEDINGS ARTICLE | September 13, 2012

SCOTS: a useful tool for specifying and testing optics in slope space

Proc. SPIE. 8493, Interferometry XVI: Techniques and Analysis

KEYWORDS: Zemax, Mirrors, X-ray optics, Lenses, Interferometry, Wavefront sensors, Wavefronts, Optical testing, LCDs, Optics manufacturing

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SPIE Journal Paper | July 6, 2012

Swing arm optical coordinate-measuring machine: high precision measuring ground aspheric surfaces using a laser triangulation probe

Wang, Yuhao , Su, Peng , Parks, Robert , Oh, Chang Jin , Burge, James

OE Vol. 51 Issue 7

KEYWORDS: Sensors, System on a chip, Calibration, Surface finishing, Aspheric lenses, Mirrors, Interferometry, Distance measurement, Polishing, Sensor calibration

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SPIE Journal Paper | April 6, 2012

Swing-arm optical coordinate measuring machine: modal estimation of systematic errors from dual probe shear measurements

Su, Peng , Parks, Robert , Wang, Yuhao , Oh, Chang Jin , Burge, James

OE Vol. 51 Issue 4

KEYWORDS: Error analysis, System on a chip, Calibration, Interferometry, Aspheric lenses, Mirrors, Optical engineering, Sensors, Profilometers, Optical testing

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PROCEEDINGS ARTICLE | November 3, 2011

Software configurable optical test system for refractive optics

Proc. SPIE. 8011, 22nd Congress of the International Commission for Optics: Light for the Development of the World

KEYWORDS: Monochromatic aberrations, Imaging systems, Cameras, Wavefronts, Optical testing, CCD cameras, Deflectometry, LCDs, Spherical lenses, Optics manufacturing

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PROCEEDINGS ARTICLE | September 27, 2011

Swing arm optical CMM: self calibration with dual probe shear test

Proc. SPIE. 8126, Optical Manufacturing and Testing IX

KEYWORDS: Mirrors, Calibration, Error analysis, Interferometry, Wavefronts, Optical testing, Profilometers, Aspheric lenses, Optical calibration, System on a chip

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PROCEEDINGS ARTICLE | September 27, 2011

Scanning Long-wave Optical Test System: a new ground optical surface slope test system

Proc. SPIE. 8126, Optical Manufacturing and Testing IX

KEYWORDS: Long wavelength infrared, Thermography, Mirrors, Polishing, Cameras, Sensors, Optical testing, Specular reflections, Optical scanning systems, Surface finishing

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PROCEEDINGS ARTICLE | May 27, 2011

Software configurable optical test system for refractive optics

Proc. SPIE. 8082, Optical Measurement Systems for Industrial Inspection VII

KEYWORDS: Monochromatic aberrations, Imaging systems, Cameras, Wavefronts, Optical testing, CCD cameras, Deflectometry, LCDs, Spherical lenses, Optics manufacturing

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PROCEEDINGS ARTICLE | September 9, 2010

A low-cost, flexible, high dynamic range test for free-form illumination optics

Proc. SPIE. 7652, International Optical Design Conference 2010

KEYWORDS: Reflectors, Zemax, Mirrors, Solar concentrators, Cameras, Optical testing, Aspheric optics, Aspheric lenses, High dynamic range imaging, Headlamps

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PROCEEDINGS ARTICLE | July 19, 2010

Scanning pentaprism test for the GMT 8.4-m off-axis segments

Proc. SPIE. 7739, Modern Technologies in Space- and Ground-based Telescopes and Instrumentation

KEYWORDS: Monochromatic aberrations, Telescopes, Mirrors, Prisms, Cameras, Sensors, Interferometry, Wavefronts, Collimation, Off axis mirrors

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PROCEEDINGS ARTICLE | August 22, 2009

Fabrication and testing of 1.4-m convex off-axis aspheric optical surfaces

Proc. SPIE. 7426, Optical Manufacturing and Testing VIII

KEYWORDS: Polishing, Optical spheres, Wavefronts, Optical fabrication, Optical testing, Computer generated holography, Aspheric lenses, Optics manufacturing, System on a chip, Surface finishing

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PROCEEDINGS ARTICLE | August 22, 2009

Swing-arm optical CMM for aspherics

Proc. SPIE. 7426, Optical Manufacturing and Testing VIII

KEYWORDS: Mirrors, Calibration, In situ metrology, Interferometry, Computer programming, Optical testing, Aspheric optics, Profilometers, Aspheric lenses, System on a chip

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PROCEEDINGS ARTICLE | August 22, 2009

Scanning pentaprism measurements of off-axis aspherics II

Proc. SPIE. 7426, Optical Manufacturing and Testing VIII

KEYWORDS: Monochromatic aberrations, Mirrors, Prisms, Sensors, Interferometry, Collimation, Projection systems, Aspheric lenses, CCD image sensors, Off axis mirrors

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PROCEEDINGS ARTICLE | July 25, 2008

Scanning pentaprism measurements of off-axis aspherics

Proc. SPIE. 7018, Advanced Optical and Mechanical Technologies in Telescopes and Instrumentation

KEYWORDS: Monochromatic aberrations, Mirrors, Prisms, Sensors, Error analysis, Interferometry, Wavefronts, Collimation, Projection systems, Off axis mirrors

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PROCEEDINGS ARTICLE | July 25, 2008

Optical metrology for very large convex aspheres

Proc. SPIE. 7018, Advanced Optical and Mechanical Technologies in Telescopes and Instrumentation

KEYWORDS: Monochromatic aberrations, Mirrors, Phase shifting, Phase modulation, Polarization, Interferometers, Computer generated holography, Monte Carlo methods, Profilometers, Aspheric lenses

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PROCEEDINGS ARTICLE | July 25, 2008

Optical surface measurements for very large flat mirrors

Proc. SPIE. 7018, Advanced Optical and Mechanical Technologies in Telescopes and Instrumentation

KEYWORDS: Monochromatic aberrations, Mirrors, Prisms, Phase shifting, Metrology, Polarization, Error analysis, Optical testing, Monte Carlo methods, Autocollimators

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PROCEEDINGS ARTICLE | September 21, 2007

Use of a commercial laser tracker for optical alignment

Proc. SPIE. 6676, Optical System Alignment and Tolerancing

KEYWORDS: Mirrors, Metrology, Retroreflectors, Interferometers, Optical testing, Computer generated holography, 3D metrology, Optical tracking, Optical alignment, Laser optics

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PROCEEDINGS ARTICLE | September 14, 2007

Fabrication and testing of large flats

Proc. SPIE. 6671, Optical Manufacturing and Testing VII

KEYWORDS: Mirrors, Polishing, Glasses, Manufacturing, Computer simulations, Optical fabrication, Optics manufacturing, Zerodur, Surface finishing, Fizeau interferometers

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PROCEEDINGS ARTICLE | September 14, 2007

Shear test of the off-axis surface with an axis-symmetric parent

Proc. SPIE. 6671, Optical Manufacturing and Testing VII

KEYWORDS: Monochromatic aberrations, Mirrors, Interferometers, Error analysis, Optical testing, Zernike polynomials, Aspheric optics, Aspheric lenses, Analytical research, Signal generators

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PROCEEDINGS ARTICLE | July 12, 2006

Maximum likelihood estimation as a general method of combining subaperture data for interferometric testing

Proc. SPIE. 6342, International Optical Design Conference 2006

KEYWORDS: Mirrors, Modulation, Interferometers, Calibration, Error analysis, Interferometry, Optical testing, Software development, Aspheric lenses, Analytical research

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