Dr. Peng Su
Assistant Research Professor, Optical Science at ASML US Inc
SPIE Involvement:
Conference Program Committee | Author
Publications (38)

PROCEEDINGS ARTICLE | September 14, 2018
Proc. SPIE. 10742, Optical Manufacturing and Testing XII
KEYWORDS: Monochromatic aberrations, Metrology, Data modeling, Cameras, Interferometry, Computer generated holography, Deflectometry, Ray tracing, Freeform optics, Systems modeling

PROCEEDINGS ARTICLE | July 22, 2016
Proc. SPIE. 9912, Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation II
KEYWORDS: Mirrors, Mirrors, Solar telescopes, Solar telescopes, Metrology, Interferometry, Optical fabrication, Computer generated holography, Bidirectional reflectance transmission function, Aspheric lenses, Off axis mirrors, Surface finishing

PROCEEDINGS ARTICLE | November 16, 2015
Proc. SPIE. 9575, Optical Manufacturing and Testing XI
KEYWORDS: Mirrors, Scattering, Cameras, Sensors, Error analysis, Computer simulations, Image analysis, Zernike polynomials, Ray tracing, Device simulation

PROCEEDINGS ARTICLE | August 27, 2015
Proc. SPIE. 9575, Optical Manufacturing and Testing XI
KEYWORDS: Mirrors, Metrology, Imaging systems, Cameras, Calibration, Lens design, Optical testing, Deflectometry, LCDs, Aspheric lenses

SPIE Journal Paper | August 5, 2015
OE Vol. 54 Issue 08
KEYWORDS: Mirrors, Calibration, Cameras, X-ray optics, X-rays, Optical testing, Metrology, Distortion, Aspheric lenses, Monochromatic aberrations

PROCEEDINGS ARTICLE | September 8, 2014
Proc. SPIE. 9195, Optical System Alignment, Tolerancing, and Verification VIII
KEYWORDS: Monochromatic aberrations, Telescopes, Mirrors, Imaging systems, Cameras, Calibration, Wavefronts, Distortion, Optical testing, Deflectometry

Showing 5 of 38 publications
Conference Committee Involvement (9)
Optical System Alignment, Tolerancing, and Verification XIII
11 August 2019 | San Diego, California, United States
Optical System Alignment, Tolerancing, and Verification XII
19 August 2018 | San Diego, California, United States
Optical System Alignment, Tolerancing, and Verification XI
6 August 2017 | San Diego, California, United States
Optical System Alignment, Tolerancing, and Verification X
28 August 2016 | San Diego, California, United States
Optical System Alignment, Tolerancing, and Verification IX
9 August 2015 | San Diego, California, United States
Showing 5 of 9 published special sections
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