Dr. Serhiy Danylyuk
at Fraunhofer ILT
SPIE Involvement:
Publications (30)

Proceedings Article | 12 March 2024 Presentation + Paper
Lutz Deriks, Eldad Bahat Treidel, Elisabeth Brandl, Julian Bravin, Enrico Brusaterra, Serhiy Danylyuk
Proceedings Volume 12872, 1287207 (2024) https://doi.org/10.1117/12.3001106
KEYWORDS: Gallium nitride, Semiconducting wafers, Sapphire, Laser bonding, Wafer bonding, Gallium, Deep ultraviolet, Transistors, Laser liftoff, Wide bandgap semiconductors

Proceedings Article | 21 November 2023 Poster + Paper
Sascha Brose, Serhiy Danylyuk, Bernhard Lüttgenau, Ismael Gisch, Lars Lohmann, Jochen Stollenwerk, Carlo Holly
Proceedings Volume 12750, 127500Q (2023) https://doi.org/10.1117/12.2683682
KEYWORDS: Spectrographs, Extreme ultraviolet, Spectral resolution, Photodiodes, Optical filters, Optical design, Design and modelling, Tunable filters, Thin films, Thin film coatings

Proceedings Article | 5 October 2023 Paper
Bernhard Lüttgenau, Sascha Brose, Serhiy Danylyuk, Jochen Stollenwerk, Carlo Holly
Proceedings Volume 12802, 1280203 (2023) https://doi.org/10.1117/12.2675605
KEYWORDS: Photomasks, Extreme ultraviolet lithography, Lithography, Photoresist materials, Nanostructures, Simulations, Phase shifts, Extreme ultraviolet, Signal intensity, Semiconducting wafers

Proceedings Article | 17 March 2023 Presentation + Paper
Serhiy Danylyuk, Martin Osbild, Leon Korr, Max Fischer, Ralph Delmdahl, Martin Reininghaus
Proceedings Volume 12409, 1240911 (2023) https://doi.org/10.1117/12.2647865
KEYWORDS: Photomasks, Deep ultraviolet, Laser ablation, Pulsed laser operation, Excimer lasers, Ultraviolet radiation, Laser applications

Proceedings Article | 1 December 2022 Presentation + Paper
Bernhard Lüttgenau, Sascha Brose, Serhiy Danylyuk, Jochen Stollenwerk, Carlo Holly
Proceedings Volume 12292, 1229208 (2022) https://doi.org/10.1117/12.2641693
KEYWORDS: Photomasks, Lithography, Extreme ultraviolet lithography, Phase shifts, Nanostructures, Extreme ultraviolet, Photoresist materials

Showing 5 of 30 publications
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