Unspecified Yukihiro Yamagata Profile

Yukihiro Yamagata

at Kyushu Univ.

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Publications (1)

Proceedings Article | 10 April 2024 Presentation

Plasma dynamics and future of LPP-EUV source for semiconductor manufacturing II

Hakaru Mizoguchi, Kentaro Toita Tomita, Masaharu Shiratani, Daisuke Nakamura, Yukihiro Yamagata, Takeshi Higashiguchi, Atsushi Sunahara

Proceedings Volume PC12953, PC129530Q (2024) https://doi.org/10.1117/12.3010018

KEYWORDS: Extreme ultraviolet, Plasma, Semiconductor manufacturing, Carbon dioxide lasers, Tin, Semiconductors, Scattering, Pulsed laser operation, Magnetism, Magnetic semiconductors

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