PROCEEDINGS VOLUME 6836
PHOTONICS ASIA 2007 | 11-15 NOVEMBER 2007
MEMS/MOEMS Technologies and Applications III
IN THIS VOLUME

0 Sessions, 43 Papers, 0 Presentations
Front Matter  (1)
MOEM I  (4)
MOEM II  (4)
Fabrication  (4)
RF MEMS  (4)
Sensor  (5)
Proceedings Volume 6836 is from: Logo
PHOTONICS ASIA 2007
11-15 November 2007
Beijing, China
Front Matter
Proc. SPIE 6836, Front Matter: Volume 6836, 683601 (31 January 2008); doi: 10.1117/12.785147
MOEM I
Proc. SPIE 6836, A review of different types of photonic MEMS tunable lasers, 683602 (29 November 2007); doi: 10.1117/12.768729
Proc. SPIE 6836, Development of a 1x2 piezoelectric optical fiber switch, 683603 (4 January 2008); doi: 10.1117/12.755360
Proc. SPIE 6836, An active interconnecting mechanism for free-space optic applications, 683604 (29 November 2007); doi: 10.1117/12.757799
Proc. SPIE 6836, Experimental study on roughness and flatness of micromirror fabricated by different anisotropic silicon etching processes, 683605 (4 January 2008); doi: 10.1117/12.768487
MOEM II
Proc. SPIE 6836, Optical MEMS devices based on micromachined torsion structure, 683606 (4 January 2008); doi: 10.1117/12.769034
Proc. SPIE 6836, Manufacturing and testing of the line-array fiber optic image slicer based on silicon V-grooves, 683607 (4 January 2008); doi: 10.1117/12.757832
Proc. SPIE 6836, Proposal and investigation for a planar MOEMS 1x8 wavelength-selective switch, 683608 (17 January 2008); doi: 10.1117/12.756879
Proc. SPIE 6836, High-speed and large-scale electromagnetically actuated MEMS scanning-mirror, 683609 (4 January 2008); doi: 10.1117/12.768475
Microfluidics
Proc. SPIE 6836, Large distance liquid pumping by AC electro-osmosis for the delivery of biological cells and reagents in microfluidic devices, 68360A (29 November 2007); doi: 10.1117/12.754098
Proc. SPIE 6836, Rapid and simple half-quantitative measurement alpha-fetoprotein by poly(dimethylsiloxane) microfluidic chip immunochromatographic assay, 68360B (4 January 2008); doi: 10.1117/12.756625
Proc. SPIE 6836, Amperometric immunosensor using electric field to improve the interaction between antibody and antigen, 68360C (8 January 2008); doi: 10.1117/12.775039
Fabrication
Proc. SPIE 6836, MEMS-based uncooled infrared bolometer arrays: a review, 68360D (4 January 2008); doi: 10.1117/12.755128
Proc. SPIE 6836, Contrastive study on the mechanical performance of MEMS microsprings fabricated by LIGA and UV-LIGA technology, 68360E (4 January 2008); doi: 10.1117/12.756048
Proc. SPIE 6836, Calibration of computer vision positioning system for MEMS wire bonder, 68360F (4 January 2008); doi: 10.1117/12.755234
Proc. SPIE 6836, A micro-electromechanical system design and manufacture considering fabrication error, 68360G (4 January 2008); doi: 10.1117/12.756124
RF MEMS
Proc. SPIE 6836, Investigation of charge accumulation in the dielectric for robust RF MEMS switches, 68360H (4 January 2008); doi: 10.1117/12.757939
Proc. SPIE 6836, New developments on polymer-based MEMS phase shifters, 68360I (4 January 2008); doi: 10.1117/12.754991
Proc. SPIE 6836, Influence of ion implantation on dielectric charging in capacitive RF MEMS switches, 68360J (4 January 2008); doi: 10.1117/12.756276
Proc. SPIE 6836, Actuation voltage wave-form dependence of charge accumulation in RF MEMS switches, 68360K (4 January 2008); doi: 10.1117/12.756390
Sensor
Proc. SPIE 6836, Integrated microsensors and systems, 68360L (7 January 2008); doi: 10.1117/12.774504
Proc. SPIE 6836, Research and fabrication of harmonic oscillator with high quality in Si-based MOEMS acceleration seismic geophone, 68360M (4 January 2008); doi: 10.1117/12.755811
Proc. SPIE 6836, A silicon micromachined infrared emitter based on SOI wafer, 68360N (8 January 2008); doi: 10.1117/12.755923
Proc. SPIE 6836, A laser-induced fluorescence optical fiber detection system for micro-fluidic chip, 68360O (25 January 2008); doi: 10.1117/12.769425
Proc. SPIE 6836, Micro amperometric immunosensor by antibody immobilizing with electropolymerized protein A, 68360P (4 January 2008); doi: 10.1117/12.775058
Sensor and Actuator
Proc. SPIE 6836, Optical fiber accelerometer based on MEMS torsional micromirror, 68360Q (4 January 2008); doi: 10.1117/12.768488
Proc. SPIE 6836, A novel optical MEMS pressure sensor with a mesa diaphragm, 68360R (4 January 2008); doi: 10.1117/12.755190
Proc. SPIE 6836, Characterizations of microcantilever chemical sensors based on SOI material, 68360S (4 January 2008); doi: 10.1117/12.758232
Poster Session
Proc. SPIE 6836, Study on the image processing algorithms for optical readout based uncooled MEMS IR imager systems, 68360U (4 January 2008); doi: 10.1117/12.754862
Proc. SPIE 6836, Research of the digital coding mask based on digital micromirror device, 68360V (4 January 2008); doi: 10.1117/12.755843
Proc. SPIE 6836, Fabrication of wall array by electrochemical etching of n-type silicon, 68360W (4 January 2008); doi: 10.1117/12.755878
Proc. SPIE 6836, Piezoelectric capacitive power generator from vibration energy, 68360Y (4 January 2008); doi: 10.1117/12.756131
Proc. SPIE 6836, Charge accumulation in composite dielectric layers in capacitive RF MEMS switches, 68360Z (4 January 2008); doi: 10.1117/12.756133
Proc. SPIE 6836, MEMS for vibration energy harvesting, 683610 (4 January 2008); doi: 10.1117/12.756153
Proc. SPIE 6836, Study for steel ball surface quality detecting based on vision technique, 683611 (4 January 2008); doi: 10.1117/12.756293
Proc. SPIE 6836, Design of maskless lithography system based on DMD, 683612 (4 January 2008); doi: 10.1117/12.756601
Proc. SPIE 6836, Study about the thermal adaptability of mirrors based on MOEMS for satellite-borne laser beam control used in multiple targets tracing, 683613 (4 January 2008); doi: 10.1117/12.757717
Proc. SPIE 6836, A novel microscanning device, 683614 (4 January 2008); doi: 10.1117/12.760847
Proc. SPIE 6836, Study on bandwidth mutual benefit between the azimuth and pitch in an optoelectronic tracking system, 683615 (17 January 2008); doi: 10.1117/12.760863
Proc. SPIE 6836, An electromagnetically actuated fiber optic switch using magnetized ferromagnetic materials, 683616 (4 January 2008); doi: 10.1117/12.758063
Proc. SPIE 6836, An optical scanner based on cantilever-type electrostatic zipping actuators, 683617 (4 January 2008); doi: 10.1117/12.767801
Proc. SPIE 6836, A fast initial alignment of MIMU in the two-dimension trajectory correction fuze for spinning projectile on stationary base, 683618 (4 January 2008); doi: 10.1117/12.756975
Proc. SPIE 6836, Multi-path optical fiber sensor for atmospheric pressure, 68361G (15 January 2008); doi: 10.1117/12.765801
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