PROCEEDINGS VOLUME 1776
SAN DIEGO '92 | 22-22 JULY 1992
Interferometry: Surface Characterization and Testing
SAN DIEGO '92
22-22 July 1992
San Diego, CA, United States
Surface Characterization and Testing I
Proc. SPIE 1776, Effects of thin films on interferometric step height measurements, 0000 (15 December 1992); https://doi.org/10.1117/12.139238
Proc. SPIE 1776, Development of optical surface-profiling instrumentation, 0000 (15 December 1992); https://doi.org/10.1117/12.139242
Proc. SPIE 1776, Rapid surface roughness measurements of coarse objects, 0000 (15 December 1992); https://doi.org/10.1117/12.139243
Proc. SPIE 1776, Surface defect analysis of semiconductor materials and devices using nanoscopy techniques, 0000 (15 December 1992); https://doi.org/10.1117/12.139244
Surface Characterization and Testing II
Proc. SPIE 1776, Moire based optical surface profiler for the minting industry, 0000 (15 December 1992); https://doi.org/10.1117/12.139245
Proc. SPIE 1776, Absolute testing of flats decomposed to even and odd functions, 0000 (15 December 1992); https://doi.org/10.1117/12.139247
Surface Characterization and Testing III
Proc. SPIE 1776, ISO figure specification (ISO-10110-5) and digital interferometry, 0000 (15 December 1992); https://doi.org/10.1117/12.139230
Proc. SPIE 1776, Absolute testing of flats using four data sets, 0000 (15 December 1992); https://doi.org/10.1117/12.139231
Proc. SPIE 1776, Retrace error: a case study, 0000 (15 December 1992); https://doi.org/10.1117/12.139232
Proc. SPIE 1776, Theory and practice of a fringe-counting thickness-uniformity test device for IR flats, domes, and conformal windows, 0000 (15 December 1992); https://doi.org/10.1117/12.139233
Surface Characterization and Testing IV
Proc. SPIE 1776, Systematic errors of a projection-moire contouring system, 0000 (15 December 1992); https://doi.org/10.1117/12.139234
Proc. SPIE 1776, Automated alignment system for aspheric mirrors, 0000 (15 December 1992); https://doi.org/10.1117/12.139235
Proc. SPIE 1776, Decenter and defocus for testing aspheric surfaces, 0000 (15 December 1992); https://doi.org/10.1117/12.139236
Proc. SPIE 1776, Limitations of phase-measuring interferometry for surface characterization and testing: a review, 0000 (15 December 1992); https://doi.org/10.1117/12.139237
Proc. SPIE 1776, Device working on the light principle for surface-roughness measurement, 0000 (15 December 1992); https://doi.org/10.1117/12.139239
Proc. SPIE 1776, New heterodyne interferometer for measuring surface topography, 0000 (15 December 1992); https://doi.org/10.1117/12.139240
Proc. SPIE 1776, Mathematical modeling of amplitude-phase measuring system for a precision surface-roughness registration, 0000 (15 December 1992); https://doi.org/10.1117/12.139241
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