Ms. Belle Antonovich Profile

Belle Antonovich

at IBM Thomas J Watson Research Ctr

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Publications (1)

Proceedings Article | 1 May 2023 Poster + Paper

Optimization of spin-on metal oxide resist performance via new development techniques on sub-30nm pitch patterning

Lior Huli, Kanzo Kato, Steven Gueci, Nathan Antonovich, Steven Grzeskowiak, David Hetzer, Eric Liu, Alexandra Krawicz, Satoru Shimura, Shinichiro Kawakami, Soichiro Okada, Karen Petrillo, Luciana Meli, Nicholas Latham, Yasiel Cabrera, Belle Antonovich

Proceedings Volume 12498, 1249822 (2023) https://doi.org/10.1117/12.2658880

KEYWORDS: Extreme ultraviolet, Metal oxides, Line edge roughness, Extreme ultraviolet lithography, Optical lithography, Inspection, Interfaces, Etching, Plasma etching, Photoresist processing

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