Dr. Bernd H. Kleemann Profile

Dr. Bernd H. Kleemann

Staff Scientist at Carl Zeiss AG

SPIE Involvement:

Author

Proceedings Article | 27 September 2016 Paper

Validity of ray trace based performance predictions of optical systems with diffractive optical elements (DOE)

Markus Seesselberg, Bernd Kleemann, Johannes Ruoff

Proceedings Volume 9953, 995306 (2016) https://doi.org/10.1117/12.2236604

KEYWORDS: Diffractive optical elements, Ray tracing, Far-field diffraction, Diffraction gratings, Computer generated holography, Geometrical optics, Optical design software, Refraction, Far-field diffraction, Diffraction, Refractive index

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Proceedings Article | 23 September 2015 Paper

Fast integral methods for integrated optical systems simulations: a review

Bernd Kleemann

Proceedings Volume 9630, 96300Q (2015) https://doi.org/10.1117/12.2192517

KEYWORDS: Diffraction gratings, Diffraction, Interfaces, Matrices, Scattering, Electromagnetism, Computer generated holography, Digital holography, Polarization, Optical simulations

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Boundary integral equation methods (BIM) or simply integral methods (IM) in the context of optical design and simulation are rigorous electromagnetic methods solving Helmholtz or Maxwell equations on the boundary (surface or interface of the structures between two materials) for scattering or/and diffraction purposes.

This work is mainly restricted to integral methods for diffracting structures such as gratings, kinoforms, diffractive optical elements (DOEs), micro Fresnel lenses, computer generated holograms (CGHs), holographic or digital phase holograms, periodic lithographic structures, and the like. In most cases all of the mentioned structures have dimensions of thousands of wavelengths in diameter. Therefore, the basic methods necessary for the numerical treatment are locally applied electromagnetic grating diffraction algorithms.

Interestingly, integral methods belong to the first electromagnetic methods investigated for grating diffraction. The development started in the mid 1960ies for gratings with infinite conductivity and it was mainly due to the good convergence of the integral methods especially for TM polarization. The first integral equation methods (IEM) for finite conductivity were the methods by D. Maystre at Fresnel Institute in Marseille: in 1972/74 for dielectric, and metallic gratings, and later for multiprofile, and other types of gratings and for photonic crystals. Other methods such as differential and modal methods suffered from unstable behaviour and slow convergence compared to BIMs for metallic gratings in TM polarization from the beginning to the mid 1990ies.

The first BIM for gratings using a parametrization of the profile was developed at Karl-Weierstrass Institute in Berlin under a contract with Carl Zeiss Jena works in 1984–1986 by A. Pomp, J. Creutziger, and the author. Due to the parametrization, this method was able to deal with any kind of surface grating from the beginning: whether profiles with edges, overhanging non-functional profiles, very deep ones, very large ones compared to wavelength, or simple smooth profiles. This integral method with either trigonometric or spline collocation, iterative solver with O(N²) complexity, named IESMP, was significantly improved by an efficient mesh refinement, matrix preconditioning, Ewald summation method, and an exponentially convergent quadrature in 2006 by G. Schmidt and A. Rathsfeld from Weierstrass-Institute (WIAS) Berlin.

The so-called modified integral method (MIM) is a modification of the IEM of D. Maystre and has been introduced by L. Goray in 1995. It has been improved for weak convergence problems in 2001 and it was the only commercial available integral method for a long time, known as PCGRATE.

All referenced integral methods so far are for in-plane diffraction only, no conical diffraction was possible. The first integral method for gratings in conical mounting was developed and proven under very weak conditions by G. Schmidt (WIAS) in 2010. It works for separated interfaces and for inclusions as well as for interpenetrating interfaces and for a large number of thin and thick layers in the same stable way. This very fast method has then been implemented for parallel processing under Unix and Windows operating systems.

This work gives an overview over the most important BIMs for grating diffraction. It starts by presenting the historical evolution of the methods, highlights their advantages and differences, and gives insight into new approaches and their achievements. It addresses future open challenges at the end.

Proceedings Article | 13 May 2013 Paper

Nanometrology of periodic nanopillar arrays by means of light scattering

Oliver Paul, Frank Widulle, Bernd Kleemann, Andreas Heinrich

Proceedings Volume 8788, 87881O (2013) https://doi.org/10.1117/12.2020880

KEYWORDS: Metrology, Data modeling, Error analysis, Scattering, Light scattering, Scatterometry, Model-based design, Silicon, Computer simulations, 3D modeling

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Proceedings Article | 23 May 2011 Paper

Fast online inverse scattering with Reduced Basis Method (RBM) for a 3D phase grating with specific line roughness

Bernd Kleemann, Julian Kurz, Jochen Hetzler, Jan Pomplun, Sven Burger, Lin Zschiedrich, Frank Schmidt

Proceedings Volume 8083, 808309 (2011) https://doi.org/10.1117/12.889364

KEYWORDS: Finite element methods, Diffraction, Maxwell's equations, Error analysis, Diffraction gratings, Inverse scattering, Scattering, Electromagnetism, Electromagnetic scattering, Polarization

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Proceedings Article | 9 September 2010 Paper

DOEs for color correction in broad band optical systems: validity and limits of efficiency approximations

Markus Seesselberg, Bernd Kleemann

Proceedings Volume 7652, 76522T (2010) https://doi.org/10.1117/12.869548

KEYWORDS: Diffraction, Diffractive optical elements, Electromagnetism, Electromagnetic simulation, Stray light, Head-mounted displays, Photographic lenses, Manufacturing, Optical design, Chromatic aberrations

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Proceedings Article | 20 May 2009 Paper

Finite-element simulations of light propagation through circular subwavelength apertures

Sven Burger, Bernd Kleemann, Lin Zschiedrich, Frank Schmidt

Proceedings Volume 7366, 736621 (2009) https://doi.org/10.1117/12.822828

KEYWORDS: Finite element methods, Computer simulations, Silver, Maxwell's equations, Nanostructures, Finite-difference time-domain method, Near field, Numerical analysis, Light scattering, 3D modeling

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Proceedings Article | 14 October 2005 Paper

Optical systems design with integrated rigorous vector diffraction

Bernd Kleemann, Johannes Ruoff, Markus Seeßelberg, Johannes-Maria Kaltenbach, Christoph Menke, Hans-Jürgen Dobschal

Proceedings Volume 5962, 596205 (2005) https://doi.org/10.1117/12.622247

KEYWORDS: Point spread functions, Polarization, Diffraction, Holographic optical elements, Diffractive optical elements, Diffraction gratings, Optical design, Optical components, Ray tracing, Objectives

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Proceedings Article | 13 January 2004 Paper

EUV spectral purity filter: optical and mechanical design, grating fabrication, and testing

Holger Kierey, Klaus Heidemann, Bernd Kleemann, Renate Winters, Wilhelm Egle, Wolfgang Singer, Frank Melzer, Rutger Wevers, Martin Antoni

Proceedings Volume 5193, (2004) https://doi.org/10.1117/12.507741

KEYWORDS: Diffraction gratings, Extreme ultraviolet, Reflectivity, Diffraction, Coating, Optical filters, Optical design, Optical fabrication, Image segmentation, Holography

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Proceedings Article | 3 November 1997 Paper

Design and efficiency characterization of diffraction gratings for applications in synchrotron monochromators by electromagnetic methods and its comparison with measurement

Bernd Kleemann, Johannes Gatzke, Christian Jung, Bruno Nelles

Proceedings Volume 3150, (1997) https://doi.org/10.1117/12.283976

KEYWORDS: Diffraction gratings, Gold, Electromagnetism, Diffraction, Synchrotrons, Monochromators, Energy efficiency, Optical design, Holography, Numerical analysis

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Proceedings Article | 7 July 1997 Paper

Comparison between rigorous light-scattering methods

Mark Davidson, Bernd Kleemann, Joerg Bischoff

Proceedings Volume 3051, (1997) https://doi.org/10.1117/12.276040

KEYWORDS: Metrology, Light scattering, Waveguides, Scattering, Polarization, Near field, Finite element methods

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Proceedings Article | 7 June 1996 Paper

Alternate rigorous method for photolithographic simulation based on profile sampling

Bernd Kleemann, Joerg Bischoff, Alfred Wong

Proceedings Volume 2726, (1996) https://doi.org/10.1117/12.240978

KEYWORDS: Diffraction, Silicon, Polarization, Aluminum, Diffraction gratings, Numerical analysis, Magnetism, Phase shifts, Optical lithography, Atomic force microscopy

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Proceedings Article | 2 March 1993 Paper

Fabrication and replication of radiation-resistant diffractive optical elements

Christel Budzinski, Bernd Kleemann

Proceedings Volume 1732, (1993) https://doi.org/10.1117/12.140454

KEYWORDS: Diffraction gratings, Copper, Diffraction, Diffractive optical elements, Holography, Etching, Photography, Dielectric polarization, Laser damage threshold, Lenses

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Showing 5 of 12 publications

Conference Committee Involvement (6)

Modeling Aspects in Optical Metrology

26 June 2017 | Munich, Germany

Modeling Aspects in Optical Metrology V

23 June 2015 | Munich, Germany

Modeling Aspects in Optical Metrology IV

13 May 2013 | Munich, Germany

Modeling Aspects in Optical Metrology

23 May 2011 | Munich, Germany

Modeling Aspects in Optical Metrology

15 June 2009 | Munich, Germany

Showing 5 of 6 Conference Committees

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