Dr. Harim Oh Profile

Dr. Harim Oh

at SAMSUNG Electronics Co., Ltd.

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Author

Publications (2)

Proceedings Article | 28 April 2023 Paper

Improvement of CD uniformity using a new selective exposure focusing method

Seonho Lee, Jaewoong Sohn, Hyosung Lee, Jaehyung Jung, Youngjun Kim, Heehong Lee, HyoungHwa Jin, Harim Oh, Yongchan Kim, Maarten Boogaarts, Nataliya Nishchenko, Jin-Sung Kim, Noh-Kyoung Park, Sang-Jin Kim, Javier Loaiza Rivas, Jens Wustenfeld, Martin de Nivelle, Valerio Altini

Proceedings Volume 12494, 124940Y (2023) https://doi.org/10.1117/12.2657203

KEYWORDS: Semiconducting wafers, Critical dimension metrology, Sensors, Scanners, High volume manufacturing, Lithography, Optical lithography, Distributed interactive simulations, Device simulation, Process control

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Proceedings Article | 26 May 2022 Presentation + Paper

Improvement of local CDU by using low speckle imaging

Hyounghwa Jin, Yongwoo Kim, Harim Oh, Jaehyung Jung, Jaewoong Sohn, Woosung Jin, Kangyeol Yun, Hyosung Lee

Proceedings Volume 12051, 1205107 (2022) https://doi.org/10.1117/12.2615747

KEYWORDS: Speckle, Semiconducting wafers, Speckle pattern, Speckle imaging, Line width roughness, Pulsed laser operation, Photoresist materials, Stochastic processes, Scanners, Optical lithography

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