Jaehyung Jung
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 28 April 2023 Paper
Proceedings Volume 12494, 124940Y (2023) https://doi.org/10.1117/12.2657203
KEYWORDS: Semiconducting wafers, Critical dimension metrology, Sensors, Scanners, High volume manufacturing, Lithography, Optical lithography, Distributed interactive simulations, Device simulation, Process control

Proceedings Article | 26 May 2022 Presentation + Paper
Proceedings Volume 12051, 1205107 (2022) https://doi.org/10.1117/12.2615747
KEYWORDS: Speckle, Semiconducting wafers, Speckle pattern, Speckle imaging, Line width roughness, Pulsed laser operation, Photoresist materials, Stochastic processes, Scanners, Optical lithography

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