Dr. Jeff Chen
Director at Applied Materials Inc
SPIE Involvement:
Publications (9)

Proceedings Article | 21 November 2023 Poster + Paper
Proceedings Volume 12751, 1275118 (2023) https://doi.org/10.1117/12.2686935
KEYWORDS: Etching, Extreme ultraviolet, Chemistry, Photomasks, Alloys, Thermodynamics, Plasma, Chemical elements, Plasma etching, Refractive index

Proceedings Article | 29 September 2023 Paper
Rebecca Stern, Jeff Chen, Rao Yalamanchili
Proceedings Volume 12915, 129150A (2023) https://doi.org/10.1117/12.2680780
KEYWORDS: Chemistry, Chemical elements, Etching, Extreme ultraviolet, Photomasks, Plasma, Refractive index, Thermodynamics

Proceedings Article | 23 October 2015 Paper
Madhavi Chandrachood, Michael Grimbergen, Keven Yu, Toi Leung, Jeffrey Tran, Jeff Chen, Darin Bivens, Rao Yalamanchili, Richard Wistrom, Tom Faure, Peter Bartlau, Shaun Crawford, Yoshifumi Sakamoto
Proceedings Volume 9635, 963516 (2015) https://doi.org/10.1117/12.2199030
KEYWORDS: Etching, Photomasks, Opacity, Chromium, Critical dimension metrology, Process control, Phase shifts, Photoresist processing, Line edge roughness, Phase modulation

Proceedings Article | 14 October 2011 Paper
John Whang, Madhavi Chandrachood, Emily Gallagher, Tom Faure, Michael Grimbergen, Shaun Crawford, Keven Yu, T. Y .B Leung, Richard Wistrom, Amitabh Sabharwal, Jeff Chen, Banqiu Wu
Proceedings Volume 8166, 81661W (2011) https://doi.org/10.1117/12.898815
KEYWORDS: Etching, Photomasks, Extreme ultraviolet, Ruthenium, Line edge roughness, Multilayers, Binary data, Manufacturing, Extreme ultraviolet lithography, Tantalum

Proceedings Article | 11 May 2009 Paper
Zhigang Mao, Tiecheng Zhou, Michael Grimbergen, Darin Bivens, David Knick, Renee Koch, Madhavi Chandrachood, Jeff Chen, Ibrahim Ibrahim, Ajay Kumar
Proceedings Volume 7379, 73791U (2009) https://doi.org/10.1117/12.824306
KEYWORDS: Plasma, Etching, Oxygen, Chromium, Chlorine, Atmospheric plasma, Spectroscopy, Photomasks, Phase modulation, Contamination

Showing 5 of 9 publications
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