Kun Qian
SPIE Involvement:
Publications (5)

Proceedings Article | 15 March 2012 Paper
Ying Qiao, Kun Qian, Costas Spanos
Proceedings Volume 8327, 83270J (2012) https://doi.org/10.1117/12.916512
KEYWORDS: Statistical modeling, Data modeling, Transistors, Semiconducting wafers, Monte Carlo methods, Optimization (mathematics), Performance modeling, Process modeling, Device simulation, Manufacturing

Proceedings Article | 19 May 2011 Paper
Andrew Neureuther, Juliet Rubinstein, Marshal Miller, Kenji Yamazoe, Eric Chin, Cooper Levy, Lynn Wang, Nuo Xu, Costas Spanos, Kun Qian, Kameshwar Poolla, Justin Ghan, Anand Subramanian, Tsu-Jae King Liu, Xin Sun, Kwangok Jeong, Puneet Gupta, Abde Kaqalwalla, Rani Ghaida, Tuck Boon Chan
Proceedings Volume 8081, 80810N (2011) https://doi.org/10.1117/12.899394
KEYWORDS: Photomasks, Double patterning technology, Lithography, Image processing, Line edge roughness, Algorithm development, Reticles, Inspection, Design for manufacturing, Device simulation

Proceedings Article | 3 April 2010 Paper
Proceedings Volume 7641, 76410G (2010) https://doi.org/10.1117/12.846704
KEYWORDS: Transistors, Semiconducting wafers, Statistical modeling, Device simulation, Instrument modeling, Oscillators, Monte Carlo methods, Statistical analysis, Data modeling, Performance modeling

Proceedings Article | 6 March 2009 Paper
Proceedings Volume 7275, 727505 (2009) https://doi.org/10.1117/12.814226
KEYWORDS: Semiconducting wafers, Device simulation, Data modeling, Optical proximity correction, Transistors, Instrument modeling, Statistical analysis, Critical dimension metrology, Light, Oscillators

Proceedings Article | 4 March 2008 Paper
Proceedings Volume 6925, 69251G (2008) https://doi.org/10.1117/12.772980
KEYWORDS: Semiconducting wafers, Process modeling, Oscillators, Lithography, Instrument modeling, Statistical analysis, Optimization (mathematics), Transistors, Statistical modeling, Error analysis

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