Selena Chen
at ASML Beijing
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 26 May 2022 Presentation + Paper
Tsewen Huang, Shueming Chen, Kevin Hsiao, Steve Lin, Ray Fei, Yufei Duan, Kevin Gao, Luke Lin, Selena Chen
Proceedings Volume 12053, 120530J (2022) https://doi.org/10.1117/12.2617685
KEYWORDS: Defect detection, Inspection, Transmission electron microscopy, Signal detection, Sensors, Semiconducting wafers, Scanning electron microscopy, Defect inspection, Data storage

Proceedings Article | 22 February 2021 Presentation + Paper
Proceedings Volume 11611, 116111Y (2021) https://doi.org/10.1117/12.2584654
KEYWORDS: Overlay metrology, Statistical analysis, Scanning electron microscopy, Metrology, Semiconducting wafers, Error analysis, Critical dimension metrology, Stochastic processes, Shape analysis, Image analysis

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