Dr. Thomas G. Brown
Professor of Optics at Univ of Rochester
SPIE Involvement:
Conference Chair | Conference Program Committee | Conference Co-Chair | Editor | Author
Publications (38)

PROCEEDINGS ARTICLE | September 5, 2014
Proc. SPIE. 9205, Reflection, Scattering, and Diffraction from Surfaces IV
KEYWORDS: MATLAB, Optical lithography, Fourier transforms, Optical testing, Medical imaging, Spatial light modulators, Projection systems, Spatial coherence, Charge-coupled devices, Statistical optics

PROCEEDINGS ARTICLE | April 2, 2014
Proc. SPIE. 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII
KEYWORDS: Semiconductors, Oxides, Polarization, Scattering, Light scattering, Scatterometry, Signal processing, Quantum mechanics, Polarization control, Scatter measurement

Showing 5 of 38 publications
Conference Committee Involvement (27)
Three-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing XXVI
2 February 2019 | San Francisco, California, United States
Optical Modeling and Performance Predictions X
22 August 2018 | San Diego, California, United States
Three-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing XXV
29 January 2018 | San Francisco, California, United States
Optical Modeling and Performance Predictions IX
8 August 2017 | San Diego, California, United States
Three-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing XXIV
30 January 2017 | San Francisco, California, United States
Showing 5 of 27 published special sections
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