CONFERENCE PROCEEDINGS
Advanced Search
Tyler Paul
at DuPont Electronics & Industrial
SPIE Involvement:
Author
Publications (2)
Proceedings Article | 9 April 2024 Paper
Impact of increasing EUV absorption of CAR polymers on lithographic performance
Yinjie Cen, Emad Aqad, Li Cui, Suzanne Coley, Jong Keun Park, Benjamin Naab-Rafael, Rochelle Rena, Tyler Paul, Sylvie Eckert, Chunyi Wu, Mike Finch, Jason Behnke, ChoongBong Lee, Karen Petrillo
Proceedings Volume 12957, 129571Z (2024) https://doi.org/10.1117/12.3010961
KEYWORDS: Polymers, Extreme ultraviolet, Absorption, Extreme ultraviolet lithography, Photoresist materials, Line width roughness, Lithography
Proceedings Article | 1 May 2023 Poster + Paper
Spin speed impact on photoresist thin film properties and EUV lithographic performance
Yinjie Cen, ChoongBong Lee, Li Cui, Suzanne Coley, Jong Keun Park, Benjamin Naab-Rafael, Emad Aqad, Rochelle Rena, Tyler Paul, Tom Penniman, Jason Behnke, Julia Early, Benjamin Foltz
Proceedings Volume 12498, 124981W (2023) https://doi.org/10.1117/12.2659101
KEYWORDS: Photoresist materials, Film thickness, Lithography, Extreme ultraviolet lithography, Line width roughness, Thin films, Surface roughness
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top