PROCEEDINGS VOLUME 7928
SPIE MOEMS-MEMS | 22-27 JANUARY 2011
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices X
Proceedings Volume 7928 is from: Logo
SPIE MOEMS-MEMS
22-27 January 2011
San Francisco, California, United States
Front Matter
Proc. SPIE 7928, Front Matter: Volume 7928, 792801 (29 March 2011); doi: 10.1117/12.891640
Packaging and Integration Technologies of MOEMS/MEMS/NEMS I
Proc. SPIE 7928, Atomic layer deposition/molecular layer deposition for packaging and interconnect of N/MEMS, 792802 (11 February 2011); doi: 10.1117/12.877110
Proc. SPIE 7928, Revolutionary innovation in system interconnection: a new era for the IC, 792803 (11 February 2011); doi: 10.1117/12.876823
Proc. SPIE 7928, Spherical and non-spherical high fill-factor microlens arrays fabricated by polymer coating on isotropically etched quartz, 792804 (28 February 2011); doi: 10.1117/12.876092
Packaging and Integration Technologies of MOEMS/MEMS/NEMS II
Proc. SPIE 7928, Packaging of MEMS/MOEMS and nanodevices: reliability, testing, and characterization aspects, 792805 (11 February 2011); doi: 10.1117/12.877099
Proc. SPIE 7928, Silicon TSV interposers for photonics and VLSI packaging, 792806 (3 March 2011); doi: 10.1117/12.876877
Test Methodology and Reliability
Proc. SPIE 7928, Fiber-based multi-beam laser Doppler vibrometer for measuring transient vibrations, 792808 (28 February 2011); doi: 10.1117/12.873164
Proc. SPIE 7928, Infrared scanning white light interferometry using a solid state light source, 792809 (26 February 2011); doi: 10.1117/12.874966
Proc. SPIE 7928, ESD testing and combdrive snap-in in a MEMS tunable grating under shock and vibration, 79280A (11 February 2011); doi: 10.1117/12.873253
Proc. SPIE 7928, Reliability of MEMS, 79280B (18 February 2011); doi: 10.1117/12.876574
Proc. SPIE 7928, Reliability enhancement of Ohmic RF MEMS switches, 79280C (18 February 2011); doi: 10.1117/12.875424
Proc. SPIE 7928, Crack growth and reliability modeling of multi-layer capacitors in microelectronics applications, 79280D (18 February 2011); doi: 10.1117/12.871536
Reliability of MEMS for Space Applications
Proc. SPIE 7928, Effects of radiation on MEMS, 79280E (18 February 2011); doi: 10.1117/12.876968
Proc. SPIE 7928, Reliability of Sn/Pb and lead-free (SnAgCu) solders of surface mounted miniaturized passive components for extreme temperature (-185 degrees C to +125 degrees C) space missions, 79280F (18 February 2011); doi: 10.1117/12.873466
Proc. SPIE 7928, Displacement damage effects in silicon MEMS at high proton doses, 79280G (18 February 2011); doi: 10.1117/12.873546
Devices for Space Applications I
Proc. SPIE 7928, MEMS technology to achieve miniaturization, redundancy, and new functionality in space, 79280H (18 February 2011); doi: 10.1117/12.876455
Proc. SPIE 7928, MOEMS for prospective space applications, 79280I (18 February 2011); doi: 10.1117/12.874665
Proc. SPIE 7928, Expanding the spacecraft application base with MEMS gyros, 79280J (18 February 2011); doi: 10.1117/12.873909
Devices for Space Applications II: Joint Session with Conference 7930 and 7931
Proc. SPIE 7928, Improved coupling to integrated spatial heterodyne spectrometers with applications to space, 79280K (18 February 2011); doi: 10.1117/12.877208
Proc. SPIE 7928, Integration of optical waveguides and microfluidics in a miniaturized antibody micro-array system for life detection in the NASA/ESA ExoMars mission, 79280L (18 February 2011); doi: 10.1117/12.879309
Poster Session
Proc. SPIE 7928, The interference effect of the Rayleigh wave and two intersecting shear-horizontal waves, 79280N (28 February 2011); doi: 10.1117/12.876069
Proc. SPIE 7928, A novel wireless Love wave biosensor platform for multifunctional detection, 79280O (28 February 2011); doi: 10.1117/12.876098
Proc. SPIE 7928, An investigation into graphene exfoliation and potential graphene application in MEMS devices, 79280P (18 February 2011); doi: 10.1117/12.878965
Proc. SPIE 7928, Optoelectronic properties and interfacial durability of CNT and ITO on boro-silicate glass and PET substrates with nano- and heterostructural aspects, 79280Q (18 February 2011); doi: 10.1117/12.871033
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