Dr. Alok Ranjan
Director at Tokyo Electron Miyagi Ltd
SPIE Involvement:
Publications (9)

Proceedings Article | 20 March 2019 Paper
Christopher Catano, Nicholas Joy, Christopher Talone, Shyam Sridhar, Sergey Voronin, Peter Biolsi, Alok Ranjan
Proceedings Volume 10963, 109630E (2019) https://doi.org/10.1117/12.2514566
KEYWORDS: Silicon, Etching, Germanium, Plasmas, Interfaces, Isotropic etching, Nanowires, Transistors, 3D applications

Proceedings Article | 20 March 2019 Open Access Paper
P. L. Ventzek, J. Shinagawa, A. Ranjan
Proceedings Volume 10963, 1096304 (2019) https://doi.org/10.1117/12.2513211
KEYWORDS: Etching, Plasma, Optical lithography, Photomasks, Plasma etching, Chemistry, Monte Carlo methods, Ions, Lithography, Silicon

Proceedings Article | 20 March 2018 Paper
Shyam Sridhar, Andrew Nolan, Li Wang, Erdinc Karakas, Sergey Voronin, Peter Biolsi, Alok Ranjan
Proceedings Volume 10589, 1058908 (2018) https://doi.org/10.1117/12.2297418
KEYWORDS: Etching, Plasmas, Dry etching, Oxides, Oxygen, Plasma treatment

Proceedings Article | 20 March 2018 Presentation + Paper
Proceedings Volume 10589, 1058909 (2018) https://doi.org/10.1117/12.2284662
KEYWORDS: Silicon, Etching, Plasma, Hydrogen, Ions, Ion beams, Oxides, Fluorine

Proceedings Article | 21 March 2017 Paper
Derren Dunn, John Sporre, Vaibhav Deshpande, Mohamed Oulmane, Ronald Gull, Peter Ventzek, Alok Ranjan
Proceedings Volume 10149, 101490Q (2017) https://doi.org/10.1117/12.2271389
KEYWORDS: Etching, Process modeling, Ions, Image processing, Oxides, Monte Carlo methods, 3D modeling, Plasma etching, Chemical elements, Interfaces, Optical lithography, Plasma, Bromine, Semiconducting wafers

Showing 5 of 9 publications
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