Mr. Gerardo T. Martinez-Alanis Profile

Gerardo T. Martinez-Alanis

at imec

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 13 June 2022 Presentation

MOL patterning challenges in scaled SRAM with vertical Surrounding Gate Transistors (SGT)

Zheng Tao, Yisuo Li, Waikin Li, Minsoo Kim, Basoene Briggs, Katia Devriendt, Lieve Teugels, Farid Sebai, Christophe Lorant, Clement Porret, Erik Rosseel, Alfonso Sepúlveda Márquez, Nicolas Jourdan, Juergen Boemmels, Jerome Mitard, Philippe Matagne, Efrain Altamirano-Sánchez, Lars-ake Ragnarsson, Anish Dangol, Dmitry Batuk, Gerardo Tadeo Martinez Alanis, Jef Geypen, Kenichi Kanazawa, Testuo Izawa, Masakazu Kakumu, Koji Sakui, Nozomu Harada

Proceedings Volume PC12056, PC120560B (2022) https://doi.org/10.1117/12.2614772

KEYWORDS: Optical lithography, Metals, Etching, Transistors, Atomic layer deposition, Silica, Inspection, Electrodes, Transmission electron microscopy, System on a chip

Read Abstract +

Proceedings Article | 25 May 2022 Presentation + Paper

Middle-of-line plasma dry etch challenges for buried power rail integration

Dunja Radisic, A. Veloso, A. Gupta, M. Hosseini, S. Wang, H. Mertens, B. Chan, D. Batuk, G. Martinez, F. Lazzarino, E. Litta, N. Horiguchi

Proceedings Volume 12056, 120560C (2022) https://doi.org/10.1117/12.2616731

KEYWORDS: Etching, Metals, Plasma etching, Optical lithography, Ruthenium, Plasma, Tin, Dielectrics, Dry etching, Molybdenum

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years