Dr. Zheng Tao
PMTS at imec
SPIE Involvement:
Publications (12)

Proceedings Article | 1 May 2023 Presentation + Paper
Proceedings Volume 12499, 1249909 (2023) https://doi.org/10.1117/12.2659095
KEYWORDS: Etching, Optical lithography, Lithography, Plasma etching, Plasma, Dry etching, Critical dimension metrology, Dielectrics

Proceedings Article | 13 June 2022 Presentation
Proceedings Volume PC12056, PC1205608 (2022) https://doi.org/10.1117/12.2615984
KEYWORDS: Optical lithography, Etching, Dielectrics, Silicon, Metals, Wafer bonding, Transistors, Surface roughness, Semiconducting wafers, Photomasks

Proceedings Article | 13 June 2022 Presentation
Proceedings Volume PC12056, PC120560B (2022) https://doi.org/10.1117/12.2614772
KEYWORDS: Optical lithography, Metals, Etching, Transistors, Atomic layer deposition, Silica, Inspection, Electrodes, Transmission electron microscopy, System on a chip

Proceedings Article | 25 May 2022 Presentation + Paper
A. Gupta, Z. Tao, D. Radisic, H. Mertens, O. Varela Pedreira, S. Demuynck, J. Bömmels, K. Devriendt, N. Heylen, S. Wang, K. Kenis, L. Teugels, F. Sebaai, C. Lorant, N. Jourdan, B. Chan, S. Subramanian, F. Schleicher, A. Peter, N. Rassoul, Y. Siew, B. Briggs, D. Zhou, E. Rosseel, E. Capogreco, G. Mannaert, A. Sepúlveda, E. Dupuy, K. Vandersmissen, B. Chehab, G. Murdoch, E. Altamirano Sanchez, S. Biesemans, Zs. Tőkei, E. Dentoni Litta, N. Horiguchi
Proceedings Volume 12056, 120560B (2022) https://doi.org/10.1117/12.2615641
KEYWORDS: Ruthenium, Metals, Molybdenum, Etching, Tungsten, Front end of line, Chemical mechanical planarization, Silicon

Proceedings Article | 23 March 2020 Presentation + Paper
Proceedings Volume 11329, 113290O (2020) https://doi.org/10.1117/12.2552022
KEYWORDS: Etching, Optical lithography, Silicon, Fin field effect transistors, Front end of line, Dry etching, Field effect transistors, Gallium arsenide, Plasma etching, Nanowires

Showing 5 of 12 publications
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