Dr. John H. Burnett
Physicist
SPIE Involvement:
Author
Publications (15)

Proceedings Article | 20 September 2016 Presentation + Paper
Proceedings Volume 9974, 99740X (2016) https://doi.org/10.1117/12.2237978
KEYWORDS: Germanium, Temperature metrology, Refractive index, Refraction, Refractometry, Prisms, Mirrors, Monochromators, Optical design, Calibration

SPIE Journal Paper | 1 April 2009
JM3, Vol. 8, Issue 02, 023005, (April 2009) https://doi.org/10.1117/12.10.1117/1.3124189
KEYWORDS: Refraction, Water, Refractive index, Prisms, Thermal optics, Lithography, Microfluidics, Absorbance, Temperature metrology, Immersion lithography

Proceedings Article | 16 March 2009 Paper
Proceedings Volume 7274, 727421 (2009) https://doi.org/10.1117/12.814324
KEYWORDS: Sapphire, Crystals, Birefringence, Polarization, Lithography, Absorption, Anisotropy, Immersion lithography, Lithographic illumination, Double patterning technology

Proceedings Article | 27 March 2007 Paper
Proceedings Volume 6520, 65204T (2007) https://doi.org/10.1117/12.712429
KEYWORDS: Photoresist materials, Refractive index, Absorbance, Sapphire, Optical lithography, Aluminum, Interfaces, Birefringence, Lutetium, Prisms

Proceedings Article | 15 March 2006 Paper
John Burnett, Simon Kaplan, Eric Shirley, Deane Horowitz, Wilfried Clauss, Andrew Grenville, Chris Van Peski
Proceedings Volume 6154, 615418 (2006) https://doi.org/10.1117/12.656901
KEYWORDS: Garnet, Spinel, Crystals, Ceramics, Aluminum, Germanium, Oxides, Lutetium, Magnesium, Optical properties

Showing 5 of 15 publications
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