Dr. Lei Zhang
at DuPont Specialty Products USA, LLC
SPIE Involvement:
Publications (4)

Proceedings Article | 1 May 2023 Presentation + Paper
Jong Keun Park, Emad Aqad, Yinjie Cen, Suzanne Coley, Li Cui, Conner Hoelzel, Benjamin Naab, Choongbong Lee, Rochelle Rena, Philjae Kang, You Rim Shin, David Limberg, Lei Zhang
Proceedings Volume 12499, 124990I (2023) https://doi.org/10.1117/12.2659178
KEYWORDS: Etching, Iodine, Extreme ultraviolet, Plasma, Plasma etching, X-ray photoelectron spectroscopy, Photoresist materials, Extreme ultraviolet lithography, Light absorption, Absorption

Proceedings Article | 25 May 2022 Presentation + Paper
Jae Hwan Sim, Yoo-Jin Ghang, Jung-June Lee, Jae Yun Ahn, Jae-Bong Lim, Joo Sung Lee, Min Young Jeong, Soojung Leem, Youngeun Bae, Yinjie Cen, James Marsh, Lei Zhang
Proceedings Volume 12055, 120550B (2022) https://doi.org/10.1117/12.2613437
KEYWORDS: Thin films, Extreme ultraviolet, Polymers, Extreme ultraviolet lithography, Semiconducting wafers, Polymer thin films, Chemical analysis, Silicon

Proceedings Article | 23 March 2020 Paper
Li Cui, Iou-Sheng Ke, Anton Chavez, Keren Zhang, Paul LaBeaume, Suzanne Coley, Shintaro Yamada, Jim Cameron, Lei Zhang, William Marshall, Benjamin Foltz
Proceedings Volume 11326, 113261N (2020) https://doi.org/10.1117/12.2552024
KEYWORDS: System on a chip, Polymers, Etching, Resistance, Carbon, Polymer thin films, X-rays, FT-IR spectroscopy, Reactive ion etching

Proceedings Article | 25 March 2019 Paper
Keren Zhang, Li Cui, Shintaro Yamada, Jim Cameron, Sabrina Wong, Lawrence Chen, Suzanne Coley, Dan Greene, Joshua Kaitz, Iou-Sheng Ke, Bhooshan Popere, Paul LaBeaume, Benjamin Foltz, Lei Zhang, Kenneth Kearns, Johnpeter Ngunjiri
Proceedings Volume 10960, 1096019 (2019) https://doi.org/10.1117/12.2514968
KEYWORDS: Chemical vapor deposition, Carbon, Polymers, Resistance, Coating, Etching, 193nm lithography, Materials

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