Dr. Yusin Yang
Master at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | March 13, 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Semiconductors, Data modeling, Scanning electron microscopy, Time metrology, Spectroscopic ellipsometry, Scanning probe microscopy, Critical dimension metrology, Semiconducting wafers, Spectroscopes, Phase shifts

PROCEEDINGS ARTICLE | March 28, 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Semiconductors, Lithography, Metrology, Statistical analysis, Data modeling, Sensors, Coating, Data processing, Wafer inspection, Analytical research, Algorithm development, Semiconducting wafers, Failure analysis

PROCEEDINGS ARTICLE | September 9, 2013
Proc. SPIE. 8880, Photomask Technology 2013
KEYWORDS: Wafer-level optics, Semiconductors, Finite-difference time-domain method, Defect detection, Polarization, Inspection, Reflectivity, Optical inspection, Optical simulations, Semiconducting wafers

PROCEEDINGS ARTICLE | April 3, 2012
Proc. SPIE. 8324, Metrology, Inspection, and Process Control for Microlithography XXVI
KEYWORDS: Semiconductors, Refractive index, Electronics, Finite-difference time-domain method, Defect detection, Dielectrics, Inspection, Electromagnetic radiation, Transmittance, Mass attenuation coefficient

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