Dr. Guy Dawson
at Univ of Birmingham
SPIE Involvement:
Publications (10)

Proceedings Article | 23 March 2020 Presentation + Paper
Alan Brown, Guy Dawson, Greg O'Callaghan, Carmen Popescu, Alexandra McClelland, Tom Lada, Bryan Schofield, Warren Montgomery, Alex P. Robinson
Proceedings Volume 11326, 1132618 (2020) https://doi.org/10.1117/12.2552215
KEYWORDS: Etching, Carbon, Fullerenes, Resistance, Silicon

Proceedings Article | 25 March 2019 Presentation + Paper
A. Brown, G. Dawson, A. McClelland, T. Lada, W. Montgomery, A. P. Robinson
Proceedings Volume 10960, 109601B (2019) https://doi.org/10.1117/12.2515087
KEYWORDS: Carbon, Etching, Resistance, Fullerenes, Chemical vapor deposition, System on a chip, Hydrogen, Nitrogen, Plasma etching, Polymethylmethacrylate

Proceedings Article | 12 October 2018 Presentation
Proceedings Volume 10809, 108090K (2018) https://doi.org/10.1117/12.2501811
KEYWORDS: Line edge roughness, Extreme ultraviolet lithography, Molecules, Chemically amplified resists, Lithography, Optical lithography, High volume manufacturing, Photoresist materials, Diffusion, Stochastic processes

Proceedings Article | 19 September 2018 Paper
Proceedings Volume 10775, 1077502 (2018) https://doi.org/10.1117/12.2316628
KEYWORDS: Electron beam lithography, Electron beams, Line edge roughness, Extreme ultraviolet lithography, Extreme ultraviolet, Line width roughness, Lithography, Diffusion

Proceedings Article | 19 March 2018 Presentation + Paper
Proceedings Volume 10583, 105831L (2018) https://doi.org/10.1117/12.2297406
KEYWORDS: Line edge roughness, Extreme ultraviolet lithography, Optical lithography, Lithography, Electron beam lithography, Extreme ultraviolet, Epoxies

Showing 5 of 10 publications
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