Dr. Hiroki Yamamoto
Researcher at QST
SPIE Involvement:
Publications (32)

Proceedings Article | 9 April 2024 Poster + Paper
Proceedings Volume 12957, 129572F (2024) https://doi.org/10.1117/12.3025195
KEYWORDS: Extreme ultraviolet lithography, Lithography, Metals, Annealing, Extreme ultraviolet, Etching, Reactive ion etching, Particles, Miniaturization, Design

Proceedings Article | 1 May 2023 Poster + Paper
Yuji Hosaka, Hiroki Yamamoto, Masahiko Ishino, Thanh-Hung Dinh, Masaharu Nishikino, Akira Kon, Shigeki Owada, Yuichi Inubushi, Yuya Kubota, Yasunari Maekawa
Proceedings Volume 12498, 1249827 (2023) https://doi.org/10.1117/12.2670220
KEYWORDS: Polymethylmethacrylate, Extreme ultraviolet, Extreme ultraviolet lithography, Lithography, Attenuation, Free electron lasers, Film thickness, X-ray lasers, Zirconium, X-rays

Proceedings Article | 23 March 2020 Paper
Proceedings Volume 11326, 113261W (2020) https://doi.org/10.1117/12.2565717
KEYWORDS: Thin films, Silicon, Electron beams, Silicon films, Scanning electron microscopy, Extreme ultraviolet

SPIE Journal Paper | 12 December 2018
JM3, Vol. 17, Issue 04, 043506, (December 2018) https://doi.org/10.1117/12.10.1117/1.JMM.17.4.043506
KEYWORDS: Absorption, Photoresist materials, Photons, Extreme ultraviolet, Electrons, Optical lithography, Chemically amplified resists, Extreme ultraviolet lithography, Photoresist developing, Metals

Proceedings Article | 12 October 2018 Presentation
Proceedings Volume 10809, 108090I (2018) https://doi.org/10.1117/12.2501647
KEYWORDS: Nanoparticles, Zirconium dioxide, Extreme ultraviolet lithography, Metals, Oxides, Chemically amplified resists, Line edge roughness, Diffusion, Polymers, Stochastic processes

Showing 5 of 32 publications
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