Dr. Lothar Berger
at Zuken GmbH
SPIE Involvement:
Publications (7)

Proceedings Article | 11 May 2007 Paper
Proceedings Volume 6607, 66070D (2007) https://doi.org/10.1117/12.728926
KEYWORDS: Sensors, Temperature metrology, Critical dimension metrology, Photomasks, Optimization (mathematics), Chemically amplified resists, Temperature sensors, Mask making, Control systems, Lithography

Proceedings Article | 5 November 2005 Paper
Jennifer Qin, Yuan Zhang, Rob Delgado, Barry Rockwell, Florence Tan, Khoi Phan, Lothar Berger, Min Liu, Uwe Dietez
Proceedings Volume 5992, 59921E (2005) https://doi.org/10.1117/12.633170
KEYWORDS: Reticles, Photomasks, Air contamination, Semiconducting wafers, Pellicles, Ultraviolet radiation, Ions, Scanners, Inspection, Chromatography

Proceedings Article | 6 May 2005 Paper
L. Berger, W. Dieckmann, C. Krauss, P. Dress, J. Waldorf, C. Y. Cheng, S. L. Wei, W. S. Chen, M. J. Kao, M. J. Tsai
Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.596484
KEYWORDS: Coating, Semiconducting wafers, Photomasks, Electron beam direct write lithography, Standards development, Direct write lithography, Lithography, Calibration, Field programmable gate arrays, Head-mounted displays

Proceedings Article | 20 August 2004 Paper
Lothar Berger, Werner Saule, Peter Dress, Thomas Gairing, C.-J. Chen, Hsin-Chang Lee, Hung-Chang Hsieh
Proceedings Volume 5446, (2004) https://doi.org/10.1117/12.557714
KEYWORDS: Photomasks, Calibration, Temperature metrology, Sensors, Critical dimension metrology, Temperature sensors, Sensor calibration, Optimization (mathematics), Chemically amplified resists, Inspection

SPIE Journal Paper | 1 April 2004
Lothar Berger, Peter Dress, Thomas Gairing, Chia-Jen Chen, Ren-Guey Hsieh, Hsin-Chang Lee, Hung-Chang Hsieh
JM3, Vol. 3, Issue 02, (April 2004) https://doi.org/10.1117/12.10.1117/1.1683338
KEYWORDS: Critical dimension metrology, Calibration, Sensors, Sensor calibration, Temperature metrology, Photomasks, Chemically amplified resists, Optimization (mathematics), Temperature sensors, Mask making

Showing 5 of 7 publications
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