Dr. Lothar Berger
at Zuken GmbH
SPIE Involvement:
Author
Publications (7)

PROCEEDINGS ARTICLE | May 11, 2007
Proc. SPIE. 6607, Photomask and Next-Generation Lithography Mask Technology XIV
KEYWORDS: Lithography, Sensors, Control systems, Temperature sensors, Photomasks, Mask making, Critical dimension metrology, Optimization (mathematics), Temperature metrology, Chemically amplified resists

PROCEEDINGS ARTICLE | November 5, 2005
Proc. SPIE. 5992, 25th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Reticles, Air contamination, Scanners, Ultraviolet radiation, Ions, Inspection, Pellicles, Photomasks, Semiconducting wafers, Chromatography

PROCEEDINGS ARTICLE | May 6, 2005
Proc. SPIE. 5751, Emerging Lithographic Technologies IX
KEYWORDS: Lithography, Calibration, Coating, Field programmable gate arrays, Photomasks, Head-mounted displays, Electron beam direct write lithography, Semiconducting wafers, Standards development, Direct write lithography

PROCEEDINGS ARTICLE | August 20, 2004
Proc. SPIE. 5446, Photomask and Next-Generation Lithography Mask Technology XI
KEYWORDS: Sensors, Calibration, Inspection, Temperature sensors, Photomasks, Critical dimension metrology, Optimization (mathematics), Sensor calibration, Temperature metrology, Chemically amplified resists

SPIE Journal Paper | April 1, 2004
JM3 Vol. 3 Issue 02
KEYWORDS: Critical dimension metrology, Calibration, Sensors, Sensor calibration, Temperature metrology, Photomasks, Chemically amplified resists, Optimization (mathematics), Temperature sensors, Mask making

PROCEEDINGS ARTICLE | December 17, 2003
Proc. SPIE. 5256, 23rd Annual BACUS Symposium on Photomask Technology
KEYWORDS: Human-machine interfaces, Lithography, Detection and tracking algorithms, Sensors, Photomasks, Neodymium, Optimization (mathematics), Photoresist processing, Temperature metrology, Chemically amplified resists

Showing 5 of 7 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top