Dr. Noah Bareket Profile

Dr. Noah Bareket

at Abbott Medical Optics

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 22 January 2001 Paper

UV inspection of EUV and SCALPEL reticles

Donald Pettibone, Noah Bareket, Ted Liang, Alan Stivers, Scott Hector, Pawitter Mangat, Douglas Resnick, Michael Lercel, Mark Lawliss, Christopher Magg, Anthony Novembre, Reginald Farrow

Proceedings Volume 4186, (2001) https://doi.org/10.1117/12.410699

KEYWORDS: Photomasks, Inspection, Charged-particle lithography, Extreme ultraviolet, Reticles, Reflectivity, Semiconducting wafers, Silicon, Ultraviolet radiation, Chromium

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Proceedings Article | 19 July 2000 Paper

Next-generation lithography mask inspection

Noah Bareket, Steve Biellak, Donald Pettibone, Stanley Stokowski

Proceedings Volume 4066, (2000) https://doi.org/10.1117/12.392104

KEYWORDS: Photomasks, Inspection, Extreme ultraviolet, Particles, Lithography, Defect detection, Reflectivity, Semiconducting wafers, Glasses, Multilayers

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Proceedings Volume Editor (1)

SPIE Conference Volume | 1 August 1983

Wavefront Sensing

Conference Committee Involvement (1)

Wavefront Sensing

24 August 1982 | San Diego, United States

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