Dr. Valeriy V. Ginzburg
Research Specialist at Dow Inc
SPIE Involvement:
Publications (7)

Proceedings Article | 27 March 2015 Paper
Dung Quach, Valeriy Ginzburg, Mingqi Li, Janet Wu, Shih-wei Chang, Peter Trefonas, Phillip Hustad, Dan Millward, Gurpreet Lugani, Scott Light
Proceedings Volume 9423, 94230N (2015) https://doi.org/10.1117/12.2085807
KEYWORDS: Optical lithography, Etching, Silicon, Reactive ion etching, Line width roughness, Polymers, Scanning electron microscopy, Cadmium, Directed self assembly, Glasses

Proceedings Article | 19 March 2015 Paper
Dan Millward, Gurpreet Lugani, Scott Light, Ardavan Niroomand, Phillip Hustad, Peter Trefonas, Dung Quach, Valeriy Ginzburg
Proceedings Volume 9423, 942304 (2015) https://doi.org/10.1117/12.2086693
KEYWORDS: Etching, Semiconducting wafers, Line width roughness, Cadmium, Scanning electron microscopy, Dry etching, Silicon, Line edge roughness, Polymers, Directed self assembly

Proceedings Article | 27 March 2014 Paper
Jieqian Zhang, Janet Wu, Mingqi Li, Valeriy Ginzburg, Jeffrey Weinhold, Michael Clark, Peter Trefonas, Phillip Hustad
Proceedings Volume 9051, 905111 (2014) https://doi.org/10.1117/12.2046328
KEYWORDS: Annealing, Optical lithography, Interfaces, Etching, Scanning electron microscopy, Thin film coatings, Coating, Thin films, Diffusion, Directed self assembly

Proceedings Article | 29 March 2013 Paper
Proceedings Volume 8682, 86820G (2013) https://doi.org/10.1117/12.2011639
KEYWORDS: Polymers, Lithography, Computer simulations, Polymethylmethacrylate, Photoresist materials, Semiconducting wafers, Photoresist processing, Chemical analysis, Wafer-level optics, Directed self assembly

Proceedings Article | 26 March 2013 Paper
Shih-wei Chang, Jessica Evans, Shouren Ge, Valeriy Ginzburg, John Kramer, Brian Landes, Christopher Lee, Greg Meyers, Daniel Murray, Jong Park, Rahul Sharma, Peter Trefonas, Jeffrey Weinhold, Jieqian Zhang, Phillip Hustad
Proceedings Volume 8680, 86800F (2013) https://doi.org/10.1117/12.2011604
KEYWORDS: Diffusion, Annealing, Optical lithography, Thin film coatings, Thin films, Polymers, Reactive ion etching, Scanning electron microscopy, Materials processing, Directed self assembly

Showing 5 of 7 publications
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