Dr. Valeriy V. Ginzburg Profile

Dr. Valeriy V. Ginzburg

Research Specialist at Dow Inc

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Author

Publications (7)

Proceedings Article | 27 March 2015 Paper

Impact of materials selection on graphoepitaxial directed self-assembly for line-space patterning

Dung Quach, Valeriy Ginzburg, Mingqi Li, Janet Wu, Shih-wei Chang, Peter Trefonas, Phillip Hustad, Dan Millward, Gurpreet Lugani, Scott Light

Proceedings Volume 9423, 94230N (2015) https://doi.org/10.1117/12.2085807

KEYWORDS: Optical lithography, Etching, Silicon, Reactive ion etching, Line width roughness, Polymers, Scanning electron microscopy, Cadmium, Directed self assembly, Glasses

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Proceedings Article | 19 March 2015 Paper

Graphoepitaxial and chemoepitaxial methods for creating line-space patterns at 33nm pitch: comparison to a HVM process

Dan Millward, Gurpreet Lugani, Scott Light, Ardavan Niroomand, Phillip Hustad, Peter Trefonas, Dung Quach, Valeriy Ginzburg

Proceedings Volume 9423, 942304 (2015) https://doi.org/10.1117/12.2086693

KEYWORDS: Etching, Semiconducting wafers, Line width roughness, Cadmium, Scanning electron microscopy, Dry etching, Silicon, Line edge roughness, Polymers, Directed self assembly

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Proceedings Article | 27 March 2014 Paper

New materials for directed self-assembly for advanced patterning

Jieqian Zhang, Janet Wu, Mingqi Li, Valeriy Ginzburg, Jeffrey Weinhold, Michael Clark, Peter Trefonas, Phillip Hustad

Proceedings Volume 9051, 905111 (2014) https://doi.org/10.1117/12.2046328

KEYWORDS: Annealing, Optical lithography, Interfaces, Etching, Scanning electron microscopy, Thin film coatings, Coating, Thin films, Diffusion, Directed self assembly

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Proceedings Article | 29 March 2013 Paper

Combining physical resist modeling and self-consistent field theory for pattern simulation in directed self-assembly

Michael Reilly, Valeriy Ginzburg, Mark Smith

Proceedings Volume 8682, 86820G (2013) https://doi.org/10.1117/12.2011639

KEYWORDS: Polymers, Lithography, Computer simulations, Polymethylmethacrylate, Photoresist materials, Semiconducting wafers, Photoresist processing, Chemical analysis, Wafer-level optics, Directed self assembly

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Proceedings Article | 26 March 2013 Paper

New materials and processes for directed self-assembly

Shih-wei Chang, Jessica Evans, Shouren Ge, Valeriy Ginzburg, John Kramer, Brian Landes, Christopher Lee, Greg Meyers, Daniel Murray, Jong Park, Rahul Sharma, Peter Trefonas, Jeffrey Weinhold, Jieqian Zhang, Phillip Hustad

Proceedings Volume 8680, 86800F (2013) https://doi.org/10.1117/12.2011604

KEYWORDS: Diffusion, Annealing, Optical lithography, Thin film coatings, Thin films, Polymers, Reactive ion etching, Scanning electron microscopy, Materials processing, Directed self assembly

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Proceedings Article | 21 March 2012 Paper

Designing new materials and processes for directed self-assembly applications

Shih-Wei Chang, Erin Vogel, Valeriy Ginzburg, Daniel Murray, John Kramer, Jeffrey Weinhold, Vivian P. Chuang, Rahul Sharma, Jessica Evans, Brian Landes, Shouren Ge, Peter Trefonas, Phillip Hustad

Proceedings Volume 8323, 83231M (2012) https://doi.org/10.1117/12.916429

KEYWORDS: Annealing, Etching, Thin films, Scanning electron microscopy, Optical lithography, Materials processing, Reactive ion etching, Directed self assembly, Transistors, Silicon

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Proceedings Article | 4 April 1994 Paper

Theory of chiral-racemic mixtures near the Smectic C-Smectic A transition point: dependence of spontaneous polarization and transition temperature on enantiometric excess

Valeriy Ginzburg, Renfan Shao, Noel Clark, David Walba

Proceedings Volume 2175, (1994) https://doi.org/10.1117/12.172124

KEYWORDS: Polarization, Molecules, Thermodynamics, Liquid crystals, Systems modeling, Molecular interactions, Physics, Ferroelectric LCDs, Photonic integrated circuits, Data modeling

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Showing 5 of 7 publications

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