Dr. Walter J. Trybula
Retired at Trybula Foundation Inc
SPIE Involvement:
Publications (15)

Proceedings Article | 10 June 2015 Paper
Proceedings Volume 9467, 94671F (2015) https://doi.org/10.1117/12.2177183
KEYWORDS: Sensors, Environmental sensing, Nanosensors, Telecommunications, Microsensors, Polymers, Packaging, Prototyping, Gas sensors, Data storage

SPIE Journal Paper | 1 January 2005
JM3, Vol. 4, Issue 01, 011007, (January 2005) https://doi.org/10.1117/12.10.1117/1.1860401
KEYWORDS: Lithography, Optical lithography, Birefringence, Optics manufacturing, Crystals, Manufacturing, Photomasks, Pellicles, Chemical elements, Silica

SPIE Journal Paper | 1 January 2005 Open Access
JM3, Vol. 4, Issue 01, 011001, (January 2005) https://doi.org/10.1117/12.10.1117/1.1875654

Proceedings Article | 6 December 2004 Paper
Proceedings Volume 5567, (2004) https://doi.org/10.1117/12.565124
KEYWORDS: Photomasks, Manufacturing, Etching, Extreme ultraviolet lithography, Reflectivity, Yield improvement, Inspection, Optical lithography, Semiconducting wafers, Chromium

Proceedings Article | 6 December 2004 Paper
Proceedings Volume 5567, (2004) https://doi.org/10.1117/12.570013
KEYWORDS: Photomasks, Ions, Particles, Contamination, Mask cleaning, Semiconducting wafers, Chromium, Pellicles, Air contamination, Manufacturing

Showing 5 of 15 publications
Conference Committee Involvement (2)
Photomask Technology
9 September 2003 | Monterey, California, United States
Photomask Technology
1 October 2002 | Monterey, CA, United States
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