Prof. Aijun Zeng
at Shanghai Institute of Optics and Fine Mechanics
SPIE Involvement:
Author
Publications (15)

PROCEEDINGS ARTICLE | November 24, 2016
Proc. SPIE. 10023, Optical Metrology and Inspection for Industrial Applications IV
KEYWORDS: Thin films, Imaging systems, Spectroscopy, Imaging spectroscopy, Chromium, Polarizers, Optical testing, Autocollimators, CCD image sensors, Mineralogy

SPIE Journal Paper | April 13, 2015
OE Vol. 54 Issue 04
KEYWORDS: Diffractive optical elements, Diffraction, Photomasks, Error analysis, Etching, Lithographic illumination, Lithography, Device simulation, Optical lithography, Tolerancing

PROCEEDINGS ARTICLE | March 31, 2014
Proc. SPIE. 9052, Optical Microlithography XXVII
KEYWORDS: Lithography, Mirrors, Microlens array, Lithographic illumination, Control systems, Micromirrors, Photomasks, Optical simulations, Optical scanning systems, 193nm lithography

PROCEEDINGS ARTICLE | December 31, 2013
Proc. SPIE. 9042, 2013 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments
KEYWORDS: Zemax, Lithography, Axicons, Lithographic illumination, Diffractive optical elements, Imaging systems, Lenses, Distortion, Zoom lenses, Resolution enhancement technologies

PROCEEDINGS ARTICLE | December 19, 2013
Proc. SPIE. 9046, 2013 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems
KEYWORDS: Lithography, Mirrors, Beam splitters, Image processing, Error analysis, Reflectivity, Beam delivery, Control systems, Image analysis, Beam controllers

PROCEEDINGS ARTICLE | August 21, 2013
Proc. SPIE. 8906, International Symposium on Photoelectronic Detection and Imaging 2013: Laser Communication Technologies and Systems
KEYWORDS: Beam splitters, Phase shifting, Polarization, Interferometers, Interferometry, Wavefronts, Phase interferometry, Optical testing, Phase shifts, Shearing interferometers

Showing 5 of 15 publications
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