Prof. Aijun Zeng
at Shanghai Institute of Optics and Fine Mechanics
SPIE Involvement:
Author
Publications (21)

PROCEEDINGS ARTICLE | July 24, 2018
Proc. SPIE. 10827, Sixth International Conference on Optical and Photonic Engineering (icOPEN 2018)
KEYWORDS: Lithography, Optical design, Optical lithography, Lithographic illumination, Diffractive optical elements, Optoelectronics, Critical dimension metrology, Device simulation, Standards development, Resolution enhancement technologies

PROCEEDINGS ARTICLE | July 24, 2018
Proc. SPIE. 10827, Sixth International Conference on Optical and Photonic Engineering (icOPEN 2018)
KEYWORDS: Optical design, Optical lithography, Homogenization, Fourier transforms, Lens design, Micromirrors, Optical simulations, Source mask optimization, Device simulation, Resolution enhancement technologies

PROCEEDINGS ARTICLE | July 24, 2018
Proc. SPIE. 10827, Sixth International Conference on Optical and Photonic Engineering (icOPEN 2018)
KEYWORDS: IRIS Consortium, Databases, Image processing, Iris, Iris recognition, Hough transforms, Image filtering, Convolution, Analytical research, Information security

PROCEEDINGS ARTICLE | July 24, 2018
Proc. SPIE. 10827, Sixth International Conference on Optical and Photonic Engineering (icOPEN 2018)
KEYWORDS: Lithography, Reticles, Optical lithography, Lithographic illumination, Diffractive optical elements, Projection systems, Excimer lasers

PROCEEDINGS ARTICLE | July 24, 2018
Proc. SPIE. 10827, Sixth International Conference on Optical and Photonic Engineering (icOPEN 2018)
KEYWORDS: Optical components, Refractive index, Modulation, Polarization, Birefringence, Quartz, Crystals, Wave plates, Optical resolution

PROCEEDINGS ARTICLE | July 24, 2018
Proc. SPIE. 10827, Sixth International Conference on Optical and Photonic Engineering (icOPEN 2018)
KEYWORDS: Reticles, Optical lithography, Lithographic illumination, Sensors, Error analysis, Light scattering, Fourier transforms, Micromirrors, Immersion lithography, Source mask optimization

Showing 5 of 21 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top