Frankie F. G. Tsai
Section Manager at Taiwan Semiconductor Manufacturing Co Ltd
SPIE Involvement:
Publications (8)

Proceedings Article | 4 December 2023 Presentation + Paper
Proceedings Volume PC12751, PC127510S (2023)
KEYWORDS: Telecommunications, Optical proximity correction, Microelectromechanical systems, Optics manufacturing, Optical communications, Electrodes, Data communications, CMOS technology, CMOS devices

Proceedings Article | 21 November 2023 Presentation + Paper
Proceedings Volume 12751, 127510N (2023)
KEYWORDS: 3D mask effects, Extreme ultraviolet, Extreme ultraviolet lithography, Thermal stability, Stochastic processes, Semiconducting wafers, Refractive index, Projection systems, Photoresist materials, Photons

Proceedings Article | 21 November 2023 Presentation + Paper
Hao-Ming Chang, Hsin-Fu Tseng, C. Lu, S. Hsu, Wei-Chung Hu, Ajay Nandoriya, Yi-An Huang, Yung-Sheng Chang, C. Wen, Frankie F. Tsai, Hiroki Miyai, Masayasu Nishizawa, Atsushi Tajima, Hirokazu Seki
Proceedings Volume 12751, 1275103 (2023)
KEYWORDS: Tin, Extreme ultraviolet, Inspection, Pellicles, Liquids, Plasma, Actinic inspection, Design and modelling, Deep ultraviolet, Sensors

Proceedings Article | 8 March 2016 Paper
Jiarui Hu, Y. L. Chen, K. H. Chen, Brian Lee, Frankie Tsai, C. M. Ke, C. H. Liao, Desmond Ngo, Benny Gosali, Robin Tijssen, Vincent Huang, Ward Tu, Marc Noot, Maryana Escalante Marun, Christian Leewis, Carlo Luijten, Frank Staals, Martijn Van Veen, Francois Furthner, Stuart Young, Kaustuve Bhattacharyya
Proceedings Volume 9778, 977829 (2016)
KEYWORDS: Metrology, Calibration, Scanners, Process control, Interfaces, Optical lithography, Semiconducting wafers, Photoresist materials, Finite element methods, Inspection, Data modeling, Diffraction

Proceedings Article | 14 October 2011 Paper
Jin-Hong Lin, C. Chen, F. G. Tsai, Tod Robinson, Daniel Yi, Jeff LeClaire, Roy White, Ron Bozak, Mike Archuletta
Proceedings Volume 8166, 81662X (2011)
KEYWORDS: Photomasks, Deep ultraviolet, Opacity, Pellicles, Femtosecond phenomena, Quartz, Image transmission, Critical dimension metrology, Manufacturing, Chromium

Showing 5 of 8 publications
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