Jong-Yuh Chang
at Taiwan Semiconductor Manufacturing Co Ltd
SPIE Involvement:
Publications (5)

Proceedings Article | 4 December 2023 Presentation + Paper
Proceedings Volume PC12751, PC127510S (2023)
KEYWORDS: Telecommunications, Optical proximity correction, Microelectromechanical systems, Optics manufacturing, Optical communications, Electrodes, Data communications, CMOS technology, CMOS devices

Proceedings Article | 4 October 2016 Paper
Jyh-Wei Hsu, Martin Samayoa, Peter Dress, Uwe Dietze, Ai-Jay Ma, Chia-Shih Lin, Rick Lai, Peter Chang, Laurent Tuo
Proceedings Volume 9985, 998515 (2016)
KEYWORDS: SRAF, Photomasks, Cavitation, Particles, Inspection, Glasses, Plasma, Mask cleaning, Acoustics, Oxygen

Proceedings Article | 14 October 2011 Paper
Thuc Dam, Dongxue Chen, Hsien-Min Chang, Noel Corcoran, Paul Yu, Linyong Pang, Chia-Wei Chang, Rick Lai, Peter Chang, Laurent Tuo
Proceedings Volume 8166, 81660O (2011)
KEYWORDS: Scanning electron microscopy, Photomasks, Semiconducting wafers, Calibration, Critical dimension metrology, Optical proximity correction, Image processing, Signal to noise ratio, Mask making, Holons

Proceedings Article | 4 November 2005 Paper
Rick Lai, Luke T. Hsu, Peter Chang, C.H. Ho, Frankie Tsai, Garrett Long, Paul Yu, John Miller, Vincent Hsu, Ellison Chen
Proceedings Volume 5992, 59920B (2005)
KEYWORDS: Photomasks, Inspection, Reticles, Diffractive optical elements, Manufacturing, Optical proximity correction, Semiconductor manufacturing, Lithography, Intelligence systems, Semiconducting wafers

Proceedings Article | 28 June 2005 Paper
Paul Yu, Vincent Hsu, Ellison Chen, Rick Lai, Kong Son, Weimin Ma, Peter Chang, Jackie Chen
Proceedings Volume 5853, (2005)
KEYWORDS: Inspection, Reticles, Defect detection, Photomasks, Defect inspection, Manufacturing, Process engineering, Sensors, Image processing

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