Rick Lai
Department Manager at Taiwan Semiconductor Manufacturing Co Ltd
SPIE Involvement:
Publications (11)

Proceedings Article | 22 November 2023 Presentation
Yian Huang, Owen Wang, Rick Lai
Proceedings Volume PC12751, PC1275105 (2023) https://doi.org/10.1117/12.2688128
KEYWORDS: Inspection, Extreme ultraviolet, Defect detection, Speckle, Signal to noise ratio, Objectives, Light sources and illumination, Calibration, Analog to digital converters

Proceedings Article | 4 October 2016 Paper
Jyh-Wei Hsu, Martin Samayoa, Peter Dress, Uwe Dietze, Ai-Jay Ma, Chia-Shih Lin, Rick Lai, Peter Chang, Laurent Tuo
Proceedings Volume 9985, 998515 (2016) https://doi.org/10.1117/12.2241143
KEYWORDS: SRAF, Photomasks, Cavitation, Particles, Inspection, Glasses, Plasma, Mask cleaning, Acoustics, Oxygen

Proceedings Article | 20 September 2013 Paper
T. Yen, Rick Lai, Laurent Tuo, Vikram Tolani, Dongxue Chen, Peter Hu, Jiao Yu, George Hwa, Yan Zheng, Suresh Lakkapragada, Kechang Wang, Danping Peng, Bill Wang, Kaiming Chiang
Proceedings Volume 8880, 88800A (2013) https://doi.org/10.1117/12.2031786
KEYWORDS: Inspection, Reticles, Photomasks, Semiconducting wafers, Contamination, Air contamination, Optical proximity correction, Scanners, Defect inspection, Visualization

Proceedings Article | 16 April 2012 Paper
Danping Peng, Ying Li, Masaki Satake, Peter Hu, Jerry Chen, S. Hsu, Rick Lai, C. Lin, Laurent C. C. Tuo
Proceedings Volume 8352, 835209 (2012) https://doi.org/10.1117/12.921128
KEYWORDS: Photomasks, Diffraction, 3D modeling, Near field, Semiconducting wafers, Spherical lenses, Lithography, Deep ultraviolet, Extreme ultraviolet, Optical proximity correction

Proceedings Article | 14 October 2011 Paper
Lin He, Noel Corcoran, Danping Peng, Vikram Tolani, Hsien-Min Chang, Paul Yu, Kechang Wang, C. J. Chen, T. H. Yen, Rick Lai, B. H. Ong, Laurent C. C. Tuo
Proceedings Volume 8166, 81661I (2011) https://doi.org/10.1117/12.896948
KEYWORDS: Inspection, Photomasks, Defect detection, Optical proximity correction, Classification systems, Image classification, Image resolution, Defect inspection, Lithography, Metals

Showing 5 of 11 publications
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