Hosadurga Shobha
at IBM Corp
SPIE Involvement:
Publications (4)

Proceedings Article | 10 April 2024 Presentation
Proceedings Volume PC12958, (2024) https://doi.org/10.1117/12.3016092
KEYWORDS: Optical lithography, Extreme ultraviolet, Double patterning technology, Metals, Design and modelling, Ruthenium, Extreme ultraviolet lithography, Copper, Resistors, Resistance

Proceedings Article | 27 April 2023 Presentation + Paper
Proceedings Volume 12496, 1249618 (2023) https://doi.org/10.1117/12.2654679
KEYWORDS: Wafer bonding, Semiconducting wafers, Distortion, Overlay metrology, Metrology, Scanners, Optical alignment, Silicon, Interfaces, Data modeling

Proceedings Article | 2 July 2019 Presentation + Paper
Dexin Kong, Koichi Motoyama, Abraham Arceo de la peña, Huai Huang, Brock Mendoza, Mary Breton, Gangadhara Raja Muthinti, Hosadurga Shobha, Liying Jiang, Juntao Li, James Demarest, John Gaudiello, Gauri Karve, Aron Cepler, Matthew Sendelbach, Susan Emans, Paul Isbester, Kavita Shah, Shay Wolfing, Avron Ger
Proceedings Volume 10959, 109590A (2019) https://doi.org/10.1117/12.2515257
KEYWORDS: Metrology, Machine learning, Scatterometry, Copper

Proceedings Article | 25 March 2019 Presentation
Proceedings Volume 10960, 109600P (2019) https://doi.org/10.1117/12.2515465
KEYWORDS: Atomic layer deposition, Etching, Lithography, Self-assembled monolayers, Photomasks, Overlay metrology, Semiconductors, Hydrogen, Polymer thin films, Polymers

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