Dr. Melisa J. Buie
Director of Operations at Coherent Inc
SPIE Involvement:
Publications (16)

Proceedings Article | 17 December 2003 Paper
Edward Hammond, Jason Clevenger, Melisa Buie
Proceedings Volume 5256, (2003) https://doi.org/10.1117/12.518200
KEYWORDS: Chlorine, Oxygen, Plasma, Electrons, Etching, Photomasks, Ions, Data modeling, Plasma etching, Particles

Proceedings Article | 17 December 2003 Paper
Proceedings Volume 5256, (2003) https://doi.org/10.1117/12.518272
KEYWORDS: Etching, Phase shifts, Quartz, Photomasks, Metrology, Interferometers, Phase measurement, Deep ultraviolet, Process control, Scanning electron microscopy

Proceedings Article | 17 December 2003 Paper
Proceedings Volume 5256, (2003) https://doi.org/10.1117/12.519188
KEYWORDS: Principal component analysis, Etching, Signal to noise ratio, Chromium, Calibration, Spectroscopy, Photomasks, Charge-coupled devices, Photoresist processing, Neural networks

Proceedings Article | 17 December 2003 Paper
Scott Anderson, Rex Anderson, Melisa Buie, Madhavi Chandrachood, Jason Clevenger, Yvette Lee, Nicole Sandlin, Jian Ding
Proceedings Volume 5256, (2003) https://doi.org/10.1117/12.518231
KEYWORDS: Etching, Reactive ion etching, Photomasks, Quartz, Ions, Phase measurement, Plasma, Phase shifts, Diffractive optical elements, Statistical analysis

Proceedings Article | 28 August 2003 Paper
Jason Clevenger, Melisa Buie, Nicole Sandlin
Proceedings Volume 5130, (2003) https://doi.org/10.1117/12.504053
KEYWORDS: Etching, Chromium, Photomasks, Semiconducting wafers, Plasma, Chemistry, Plasma etching, Signal detection, Dry etching, Aluminum

Showing 5 of 16 publications
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