Mr. Seokyoon Jeong Profile

Seokyoon Jeong

at SAMSUNG Electronics Co Ltd

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 28 April 2023 Presentation + Paper

Unsupervised ML classification driven process model coverage check

SeungWon Song, Seokyoon Jeong, Sangwoo Park, Jungkee Choi, WoonHyuk Choi, No-young Chung, Seongtae Jeong, Fan Jiang, Liang Cao, Le Hong, Junhyoung Park, Doohwan Kwak, Jongwon Lee, Harin Kim, Jiyoung Lee

Proceedings Volume 12495, 1249518 (2023) https://doi.org/10.1117/12.2658322

KEYWORDS: Data modeling, Process modeling, Machine learning, Optical proximity correction, Statistical modeling, Calibration, Instrument modeling, Metrology, Design and modelling, Resolution enhancement technologies

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Proceedings Article | 4 April 2011 Paper

Lithography aware design optimization using ILT

Jaeyoon Jeong, Seokyun Jeong, Changhoon Ahn, Yongsun Jang, Sukjoo Lee, Thomas Cecil, Donghwan Son, Tatung Chow, David Kim

Proceedings Volume 7974, 797409 (2011) https://doi.org/10.1117/12.879393

KEYWORDS: Photomasks, Lithography, Optical proximity correction, Source mask optimization, Photovoltaics, Optical lithography, Optimization (mathematics), Detection and tracking algorithms, Electroluminescence, Semiconducting wafers

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