Il-Ho Lee
Senior Manager at Dongbu HiTek Co Ltd
SPIE Involvement:
Publications (10)

Proceedings Article | 10 May 2005 Paper
Byoung-Tak Jeon, Ook-Hyun Kim, Jeong-Heon Baik, Jeong-Hyuk Ha, Il-Ho Lee, Weon-Sik Yang
Proceedings Volume 5752, (2005)
KEYWORDS: Zinc, Photoresist materials, Semiconducting wafers, Head-mounted displays, Lithography, Coating, Transition metals, Optical lithography, Spectroscopy, Deep ultraviolet

Proceedings Article | 24 May 2004 Paper
Jeong-Heon Baik, Dong-Jin Lee, Sung-Ho Lee, Sun-Hyung Park, Il-Ho Lee, Jae-Sung Choi
Proceedings Volume 5375, (2004)
KEYWORDS: Etching, Semiconducting wafers, Coating, Photoresist processing, Transistors, Particles, Inspection, Failure analysis, Critical dimension metrology, Reflectivity

Proceedings Article | 12 June 2003 Paper
Il-Ho Lee, Jin-Seo Lee, Kwan-Yul Lee, Chun-Geun Park, Jae-Sung Choi, Jeong Lee
Proceedings Volume 5039, (2003)
KEYWORDS: Oxides, Semiconducting wafers, Photoresist processing, Head-mounted displays, Silicon, Lithography, Fluorine, Chemical mechanical planarization, Optical lithography, Photoemission spectroscopy

Proceedings Article | 22 January 2001 Paper
Makoto Kozuma, Masaya Komatsu, Rieko Arakawa, Seiji Kubo, Tatsuya Takahashi, John Jensen, Hyun-Suk Bang, Il-Ho Lee, Cheol Shin, Hong-Seok Kim, Keun-Won Park
Proceedings Volume 4186, (2001)
KEYWORDS: Reticles, Critical dimension metrology, Logic, Image processing, Overlay metrology, Computer aided design, Manufacturing, Dry etching, Transistors, Etching

Proceedings Article | 19 July 2000 Paper
Il-Ho Lee, Kyung-Han Nam, Hong-Seok Kim
Proceedings Volume 4066, (2000)
KEYWORDS: Optical proximity correction, Scattering, Photomasks, Head, Quartz, Dry etching, Backscatter, Lithium, Chemically amplified resists, Scanning electron microscopy

Showing 5 of 10 publications
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