Dr. Kai Peter
at Infineon Technologies AG
SPIE Involvement:
Publications (14)

Proceedings Article | 5 April 2011 Paper
Reinhard März, Kai Peter, Kay Engelhardt
Proceedings Volume 7974, 79740R (2011) https://doi.org/10.1117/12.879237
KEYWORDS: Lithography, Metals, Design for manufacturing, Analog electronics, Polishing, Multilayers, Pollution control, Manufacturing, Americium, Design for manufacturability

Proceedings Article | 4 March 2008 Paper
Jacques Herry, Reinhard März, Hanno Melzner, Kai Peter, Olivier Rizzo
Proceedings Volume 6925, 69250J (2008) https://doi.org/10.1117/12.770292
KEYWORDS: Metals, Lithography, Connectors, Virtual colonoscopy, Design for manufacturing, Yield improvement, Optics manufacturing, Manufacturing, Antennas, Particles

Proceedings Article | 4 March 2008 Paper
Reinhard März, Kai Peter, Monika Gschöderer, Eduard Ratai, Alexander Nielsen, Sascha Siegler, Rosi Deppe, Anton Huber
Proceedings Volume 6925, 692510 (2008) https://doi.org/10.1117/12.771885
KEYWORDS: Transistors, Field effect transistors, Calibration, Lithography, Chemical mechanical planarization, Resolution enhancement technologies, Doping, Analog electronics, Cadmium, Silicon

Proceedings Article | 27 March 2007 Paper
Chin Teong Lim, Kai Peter, Vlad Temchenko, Dave Wallis, Dieter Kaiser, Ingo Meusel, Sebastian Schmidt, Martin Niehoff
Proceedings Volume 6520, 65204E (2007) https://doi.org/10.1117/12.711395
KEYWORDS: Optical proximity correction, Polishing, Design for manufacturing, Image processing, Lithography, Computer simulations, Optics manufacturing, Photomasks, Design for manufacturability, Image quality

Proceedings Article | 21 March 2007 Paper
Reinhard März, Kai Peter, Sonja Gröndahl, Klaus Keiner, Byoung Il Choi, Shyue Fong Quek, Mei Chun Yeo, Nan Shu Chen, Soo Muay Goh
Proceedings Volume 6521, 65210M (2007) https://doi.org/10.1117/12.713995
KEYWORDS: Calibration, Process modeling, Lithography, Resolution enhancement technologies, Design for manufacturing, Semiconducting wafers, Prototyping, 3D modeling, Scanning electron microscopy, Printing

Showing 5 of 14 publications
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