Dr. Vicky Philipsen
at IMEC
SPIE Involvement:
Author
Publications (58)

PROCEEDINGS ARTICLE | March 19, 2018
Proc. SPIE. 10583, Extreme Ultraviolet (EUV) Lithography IX
KEYWORDS: Lithography, Image processing, Photomasks, Extreme ultraviolet lithography, Double patterning technology, Optical proximity correction

PROCEEDINGS ARTICLE | March 19, 2018
Proc. SPIE. 10583, Extreme Ultraviolet (EUV) Lithography IX
KEYWORDS: Thin films, Lithography, Refractive index, Nickel, Reflectivity, Photomasks, Extreme ultraviolet, Ruthenium, Phase shifts

PROCEEDINGS ARTICLE | October 16, 2017
Proc. SPIE. 10450, International Conference on Extreme Ultraviolet Lithography 2017
KEYWORDS: Thin films, Lithography, Metals, X-rays, Nickel, Manufacturing, Cobalt, Photomasks, Extreme ultraviolet, Chemical elements

PROCEEDINGS ARTICLE | September 28, 2017
Proc. SPIE. 10446, 33rd European Mask and Lithography Conference
KEYWORDS: Optical properties, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography

SPIE Journal Paper | August 1, 2017
JM3 Vol. 16 Issue 04

PROCEEDINGS ARTICLE | March 24, 2017
Proc. SPIE. 10143, Extreme Ultraviolet (EUV) Lithography VIII
KEYWORDS: Optical lithography, Data modeling, Calibration, Resistance, 3D modeling, Photomasks, Extreme ultraviolet lithography, Semiconducting wafers, Stochastic processes

Showing 5 of 58 publications
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