Dr. Rasmus B. Nielsen
at ASML Netherlands BV
SPIE Involvement:
Author
Publications (8)

SPIE Journal Paper | March 18, 2013
JM3 Vol. 12 Issue 02
KEYWORDS: Photomasks, Reticles, Critical dimension metrology, Semiconducting wafers, Extreme ultraviolet lithography, Extreme ultraviolet, Cadmium, Reflectivity, Scanners, Semiconductors

PROCEEDINGS ARTICLE | November 8, 2012
Proc. SPIE. 8522, Photomask Technology 2012
KEYWORDS: Semiconductors, Reticles, Cadmium, Scanners, Reflectivity, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Critical dimension metrology, Semiconducting wafers

PROCEEDINGS ARTICLE | September 10, 2011
Proc. SPIE. 8093, Metamaterials: Fundamentals and Applications IV
KEYWORDS: Finite-difference time-domain method, Nanoantennas, Polarization, Metals, Dielectrics, Silver, Near field scanning optical microscopy, Near field, Antennas, Near field optics

PROCEEDINGS ARTICLE | September 11, 2010
Proc. SPIE. 7757, Plasmonics: Metallic Nanostructures and Their Optical Properties VIII
KEYWORDS: Gold, Plasmonics, Refractive index, Nanoantennas, Reflection, Scattering, Light scattering, Antennas, Split ring resonators, Nanorods

PROCEEDINGS ARTICLE | April 29, 2010
Proc. SPIE. 7711, Metamaterials V
KEYWORDS: Ellipsometry, Nanoantennas, Optical properties, Sputter deposition, Metals, Composites, Dielectrics, Silver, Antennas, Zinc oxide

PROCEEDINGS ARTICLE | September 2, 2009
Proc. SPIE. 7395, Plasmonics: Nanoimaging, Nanofabrication, and their Applications V
KEYWORDS: Surface plasmons, Polymethylmethacrylate, Interfaces, Silver, Atomic force microscopy, Photoresist materials, Photomasks, Aluminum, Reactive ion etching, Semiconducting wafers

Showing 5 of 8 publications
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