Dr. Parul Dhagat
Graduate Research Assistant at GLOBALFOUNDRIES Inc
SPIE Involvement:
Author
Publications (2)

SPIE Journal Paper | February 7, 2017
JM3 Vol. 16 Issue 01
KEYWORDS: Directed self assembly, Resolution enhancement technologies, Lithography, Metals, Optical lithography, Photomasks, 3D modeling, Computational lithography, Optical proximity correction

PROCEEDINGS ARTICLE | March 22, 2016
Proc. SPIE. 9777, Alternative Lithographic Technologies VIII
KEYWORDS: Lithography, Optical lithography, Statistical analysis, Data modeling, Calibration, Metals, Interfaces, 3D modeling, Scanning electron microscopy, Photomasks, Directed self assembly, Computational lithography, Picosecond phenomena, Optimization (mathematics)

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