Dr. Parul Dhagat Profile

Dr. Parul Dhagat

Graduate Research Assistant at GlobalFoundries

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Publications (2)

SPIE Journal Paper | 7 February 2017

Design technology co-optimization assessment for directed self-assembly-based lithography: design for directed self-assembly or directed self-assembly for design?

Kafai Lai, Chi-Chun Liu, Hsinyu Tsai, Yongan Xu, Cheng Chi, Ananthan Raghunathan, Parul Dhagat, Lin Hu, Oseo Park, Sunggon Jung, Wooyong Cho, Jaime Morillo, Jed Pitera, Kristin Schmidt, Mike Guillorn, Markus Brink, Daniel Sanders, Nelson Felix, Todd Bailey, Matthew Colburn

JM3, Vol. 16, Issue 01, 013502, (February 2017) https://doi.org/10.1117/12.10.1117/1.JMM.16.1.013502

KEYWORDS: Directed self assembly, Resolution enhancement technologies, Lithography, Metals, Optical lithography, Photomasks, 3D modeling, Computational lithography, Optical proximity correction

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Proceedings Article | 22 March 2016 Paper

Modeling and parameter tuning for templated directed self-assembly

H.-J. Stock, B. Meliorisz, T. Mülders, S. Marokkey, W. Demmerle, K. Lai, A. Raghunathan, P. Dhagat

Proceedings Volume 9777, 97770Z (2016) https://doi.org/10.1117/12.2219158

KEYWORDS: Calibration, Data modeling, 3D modeling, Computational lithography, Lithography, Optimization (mathematics), Directed self assembly, Optical lithography, Metals, Photomasks, Scanning electron microscopy, Statistical analysis, Picosecond phenomena, Interfaces

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