Dr. Cheng Chi
at IBM Thomas J Watson Research Ctr
SPIE Involvement:
Publications (14)

Proceedings Article | 22 April 2021 Presentation + Paper
Cheng Chi, Julian Dolby, Jeffrery Shearer, Derren Dunn, Sean Burns
Proceedings Volume 11614, 116140N (2021) https://doi.org/10.1117/12.2584621

Proceedings Article | 17 April 2020 Presentation + Paper
Cheng Chi, Hao Tang, Oseo Park, Jing Xue, Jing Guo, Geng Han, Charlie King, Jeff Shearer, Sean Burns
Proceedings Volume 11327, 113270E (2020) https://doi.org/10.1117/12.2550834
KEYWORDS: SRAF, Photomasks, Semiconducting wafers, Optical proximity correction, Data modeling, Yield improvement, Optics manufacturing, Optical lithography, Deep ultraviolet, Logic

Proceedings Article | 26 March 2019 Presentation + Paper
Jing Guo, Dustin Janes, Yann Mignot, Richard Johnson, Cheng Chi, Chi-Chun Liu, Luciana Meli, Takuya Kuroda, Domenico DiPaola, Yuji Tanaka, Harumoto Masahiko, Nelson Felix, Daniel Corliss
Proceedings Volume 10958, 109580N (2019) https://doi.org/10.1117/12.2515153
KEYWORDS: Polymethylmethacrylate, Optical lithography, Extreme ultraviolet lithography, Critical dimension metrology, Etching, Chemistry, Ultraviolet radiation, Defect inspection, Extreme ultraviolet, Polymers

Proceedings Article | 6 September 2018 Paper
Balint Meliorisz, Kafai Lai, Ulrich Welling, Hans-Jürgen Stock, Sajan Marokkey, Thomas Muelders, Jing Sha, Chi-chun Liu, Cheng Chi, Jing Guo, Clifford Osborn, Jaime Morillo, Wolfgang Demmerle, Derren Dunn
Proceedings Volume 10586, 105860R (2018) https://doi.org/10.1117/12.2297344
KEYWORDS: Metals, Directed self assembly, Critical dimension metrology, Calibration, Error analysis, Etching, Computer simulations, Process modeling, Optical lithography, Extreme ultraviolet lithography

Proceedings Article | 28 March 2018 Paper
Proceedings Volume 10584, 105840L (2018) https://doi.org/10.1117/12.2297365
KEYWORDS: Etching, Critical dimension metrology, Metals, Directed self assembly, Oxides, Back end of line, Dielectrics, Scanning electron microscopy, Tin, Lithography

Showing 5 of 14 publications
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