Dr. Thuc Dam
Sr. Manager Product Engineering at Synopsys Inc
SPIE Involvement:
Publications (33)

Proceedings Article | 10 April 2024 Presentation
Proceedings Volume 12954, 1295413 (2024) https://doi.org/10.1117/12.3014637
KEYWORDS: Photomasks, Deep ultraviolet, Optical proximity correction, Extreme ultraviolet lithography, Ecosystems, Lithography, Extreme ultraviolet, Yield improvement, Source mask optimization, Printing

Proceedings Article | 1 May 2023 Presentation + Paper
Maryvonne Chalony, Lawrence Melvin, Rainer Zimmermann, Bernd Küchler, Emilie Viasnoff, Robert Scarmozzino, Daniel Herrmann, Yves Saad, Phil Stopford, Thuc Dam, Ulrich Klostermann, Wolfgang Demmerle, Al Blais, Remco Stoffer
Proceedings Volume 12499, 124990A (2023) https://doi.org/10.1117/12.2658788
KEYWORDS: Design and modelling, Manufacturing, Polarization, Optics manufacturing, Photonic devices, Optical lithography, Incident light, Metalenses, Geometrical optics, Optical proximity correction

Proceedings Article | 28 April 2023 Presentation + Paper
Proceedings Volume 12495, 1249503 (2023) https://doi.org/10.1117/12.2657538
KEYWORDS: Design and modelling, Optical proximity correction, Semiconducting wafers, Lithography, Manufacturing, Visualization, Reticles, Printing, 193nm lithography, Source mask optimization

Proceedings Article | 28 April 2023 Presentation + Paper
Jun Zhu, Lin Wang, Brad Falch, Thuc Dam, Yongdong Wang, Petrisor Panaite, Mingchao Ji, Yuan Yuan Li, Ming Su
Proceedings Volume 12495, 124950X (2023) https://doi.org/10.1117/12.2662031
KEYWORDS: Design and modelling, Resolution enhancement technologies, Manufacturing, Lithography, Source mask optimization, Reconstruction algorithms, Printing, Yield improvement, Visual inspection, Very large scale integration

Proceedings Article | 28 April 2023 Presentation + Paper
Proceedings Volume 12495, 124950B (2023) https://doi.org/10.1117/12.2659721
KEYWORDS: Reticles, Etching, Tolerancing, Extreme ultraviolet lithography, Simulations, Mirrors, Scanners, Manufacturing, Semiconducting wafers, Metals

Showing 5 of 33 publications
  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top