Dr. Zhuan Liu
Senior Scientist at Onto Innovation Inc
SPIE Involvement:
Publications (18)

Proceedings Article | 10 April 2024 Poster + Paper
Proceedings Volume 12955, 129551X (2024) https://doi.org/10.1117/12.3000815
KEYWORDS: Analog to digital converters, Deep learning, Machine learning, Education and training, Image classification, Evolutionary algorithms, Performance modeling, Matrices, Library classification systems, Image processing

Proceedings Article | 26 May 2022 Presentation + Paper
Proceedings Volume 12053, 120530T (2022) https://doi.org/10.1117/12.2618035
KEYWORDS: Silicon, Etching, Metrology, Semiconducting wafers, Mid-IR, Diffractive optical elements, Silica, Scattering, Critical dimension metrology, Absorption

Proceedings Article | 22 February 2021 Presentation + Paper
Proceedings Volume 11611, 116111O (2021) https://doi.org/10.1117/12.2583786

SPIE Journal Paper | 16 October 2014
Jie Li, Shahin Zangooie, Karthik Boinapally, Xi Zou, Jiangtao Hu, Zhuan Liu, Sanjay Yedur, Peter Wilkens, Avraham Ver, Robert Cohen, Babak Khamsehpour, Holger Schroder, John Piggot
JM3, Vol. 13, Issue 04, 041406, (October 2014) https://doi.org/10.1117/12.10.1117/1.JMM.13.4.041406
KEYWORDS: Critical dimension metrology, Scatterometry, Line edge roughness, Reactive ion etching, Metrology, Scatter measurement, Semiconducting wafers, Optics manufacturing, Magnetism, Etching

Proceedings Article | 2 April 2014 Paper
Jie Li, Shahin Zangooie, Karthik Boinapally, Jiangtao Hu, Zhuan Liu, Sanjay Yedur, Peter Wilkens, Avraham Ver, Robert Cohen, Babak Khamsepour, Xi Zou
Proceedings Volume 9050, 90502T (2014) https://doi.org/10.1117/12.2046639
KEYWORDS: Reactive ion etching, Scatterometry, Critical dimension metrology, Metrology, Magnetism, Manufacturing, Photomasks, Etching, Measurement devices, Semiconducting wafers

Showing 5 of 18 publications
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