PROCEEDINGS VOLUME 4755
SYMPOSIUM ON DESIGN, TEST, INTEGRATION, AND PACKAGING OF MEMS/MOEMS 2002 | 19-19 MARCH 2002
Design, Test, Integration, and Packaging of MEMS/MOEMS 2002
SYMPOSIUM ON DESIGN, TEST, INTEGRATION, AND PACKAGING OF MEMS/MOEMS 2002
19-19 March 2002
Cannes-Mandelieu, France
Joint Invited Papers
Proc. SPIE 4755, Micro-optical phased arrays for spatial and spectral switching, 0000 (19 April 2002); doi: 10.1117/12.462796
Proc. SPIE 4755, In-situ sensors for product reliability monitoring, 0000 (19 April 2002); doi: 10.1117/12.462807
Analysis, Tools, and Methods
Proc. SPIE 4755, Improved convergence of electromechanical transducer element, 0000 (19 April 2002); doi: 10.1117/12.462818
Proc. SPIE 4755, New approach for 3D capacitance extractions for complex structures with conformal dielectrics, 0000 (19 April 2002); doi: 10.1117/12.462829
Proc. SPIE 4755, Integration of a network solver and a field solver for the mixed-level thermal simulation of MEMS problems, 0000 (19 April 2002); doi: 10.1117/12.462840
Proc. SPIE 4755, Calculation of inductances and capacitances for 3D structures using Prony's method, 0000 (19 April 2002); doi: 10.1117/12.462851
Proc. SPIE 4755, Surface tension defects in microfluidic self-alignment, 0000 (19 April 2002); doi: 10.1117/12.462862
Proc. SPIE 4755, SystemC-based cosimulation for global validation of MOEMS, 0000 (19 April 2002); doi: 10.1117/12.462873
Design and Characterization
Proc. SPIE 4755, Design and experiment of silicon PCR chips, 0000 (19 April 2002); doi: 10.1117/12.462884
Proc. SPIE 4755, Low-loss microstrip MEMS technology for passive components design in the Ka-band, 0000 (19 April 2002); doi: 10.1117/12.462797
Proc. SPIE 4755, Modeling of microsystem flow sensor based on thermal time-of-flight mode, 0000 (19 April 2002); doi: 10.1117/12.462798
Proc. SPIE 4755, Design and characterization of levitated suspended rf inductors, 0000 (19 April 2002); doi: 10.1117/12.462799
Proc. SPIE 4755, CAD tool for the design and manufacturing of freeform micro-EDM electrodes, 0000 (19 April 2002); doi: 10.1117/12.462800
Manufacturing Variations and Tuning
Proc. SPIE 4755, Modeling methodology for a CMOS-MEMS electrostatic comb, 0000 (19 April 2002); doi: 10.1117/12.462801
Proc. SPIE 4755, Parametric yield optimization of MEMS, 0000 (19 April 2002); doi: 10.1117/12.462802
Proc. SPIE 4755, Architecture-level center frequency drift compensation method for micromechanical filters used in IF stages of wireless telecommunication receivers, 0000 (19 April 2002); doi: 10.1117/12.462803
Proc. SPIE 4755, Influence of process variation on the functionality of a high-pressure sensor, 0000 (19 April 2002); doi: 10.1117/12.462804
Methods, Tools, and Design Flows
Proc. SPIE 4755, Generation of MEMS component models using Cosserat symbolic simulations, 0000 (19 April 2002); doi: 10.1117/12.462805
Proc. SPIE 4755, Modeling optoelectronic devices for simulation by means of element stamps, 0000 (19 April 2002); doi: 10.1117/12.462806
Proc. SPIE 4755, Standardizing the microsystems technology description, 0000 (19 April 2002); doi: 10.1117/12.462808
Proc. SPIE 4755, Behavioral modeling and simulation of a MEMS-based ultrasonic pulse-echo system, 0000 (19 April 2002); doi: 10.1117/12.462809
Proc. SPIE 4755, Application of XML to geometric modeling of MEMS, 0000 (19 April 2002); doi: 10.1117/12.462810
Component Design
Proc. SPIE 4755, Design and fabrication of a novel low-cost hotplate micro gas sensor, 0000 (19 April 2002); doi: 10.1117/12.462811
Proc. SPIE 4755, Design of electrostatic actuators for MOEMS applications, 0000 (19 April 2002); doi: 10.1117/12.462812
Proc. SPIE 4755, On-chip synchronous detection for CMOS BDJ optical detector, 0000 (19 April 2002); doi: 10.1117/12.462813
Proc. SPIE 4755, Digital compensation technique for the improvement of the comb drive actuator transient response, 0000 (19 April 2002); doi: 10.1117/12.462814
Poster Papers: CAD, Design, and Test
Proc. SPIE 4755, Application of a computer-supported method for design optimization of micro-optical systems on an IR gas sensor, 0000 (19 April 2002); doi: 10.1117/12.462815
Proc. SPIE 4755, Optimization of the planar pellistor using finite element analysis, 0000 (19 April 2002); doi: 10.1117/12.462816
Proc. SPIE 4755, MOSCITO: a program system for MEMS optimization, 0000 (19 April 2002); doi: 10.1117/12.462817
Proc. SPIE 4755, Efficient and reliable design of microsystems, 0000 (19 April 2002); doi: 10.1117/12.462819
Proc. SPIE 4755, Behavioral modeling and multicriteria optimization of a radometric sensor, 0000 (19 April 2002); doi: 10.1117/12.462820
Proc. SPIE 4755, Efforts in developing design and simulation tools for MEMS: DS/MEMS and CA/MEMS, 0000 (19 April 2002); doi: 10.1117/12.462821
Proc. SPIE 4755, Development of a new contact-type piezoresistive micro-shear-stress sensor, 0000 (19 April 2002); doi: 10.1117/12.462822
Proc. SPIE 4755, Dynamics simulation of MEMS device embedded-hard-disk-drive system, 0000 (19 April 2002); doi: 10.1117/12.462823
Proc. SPIE 4755, Design and simulation of a new planar OADM component, 0000 (19 April 2002); doi: 10.1117/12.462824
Proc. SPIE 4755, Design of a CMOS BDJ detector array for fluorescence imaging application, 0000 (19 April 2002); doi: 10.1117/12.462825
Proc. SPIE 4755, High-performance MEMS microgyroscope, 0000 (19 April 2002); doi: 10.1117/12.462826
Proc. SPIE 4755, Frequency-selective silicon vibration sensor with direct electrostatic stiffness modulation, 0000 (19 April 2002); doi: 10.1117/12.462827
Proc. SPIE 4755, Perspectives of microsystem engineering development in Russia, 0000 (19 April 2002); doi: 10.1117/12.462828
Proc. SPIE 4755, System-level simulation of acoustic devices, 0000 (19 April 2002); doi: 10.1117/12.462830
Proc. SPIE 4755, Computation of the potential due to the distribution of sources and normal dipoles over a flat panel, 0000 (19 April 2002); doi: 10.1117/12.462831
Proc. SPIE 4755, Tolerance analysis and synthesis in microsystems, 0000 (19 April 2002); doi: 10.1117/12.462832
Proc. SPIE 4755, System-level modeling of microsystems using order reduction methods, 0000 (19 April 2002); doi: 10.1117/12.462833
Proc. SPIE 4755, Strength of signal flow in circuit simulation and its application, 0000 (19 April 2002); doi: 10.1117/12.462834
Proc. SPIE 4755, Behavioral modeling of medical test strips for optimization, 0000 (19 April 2002); doi: 10.1117/12.462835
Proc. SPIE 4755, Analysis of microsprings for calculating the force produced by microactuators, 0000 (19 April 2002); doi: 10.1117/12.462836
Proc. SPIE 4755, MEMS Max: a new full- 3D MEMS-featured rf-FEM analysis environment, 0000 (19 April 2002); doi: 10.1117/12.462837
Proc. SPIE 4755, Efficient MEMS design methodology integrating finite-element-based macromodels into a nodal-approach MEMS component design tool, 0000 (19 April 2002); doi: 10.1117/12.462838
Proc. SPIE 4755, Characterization of MEMS by feedback interferometry, 0000 (19 April 2002); doi: 10.1117/12.462839
Proc. SPIE 4755, Optical interferometric detection of a mechanical-silicon oscillator, 0000 (19 April 2002); doi: 10.1117/12.462841
Components for Communications Applications
Proc. SPIE 4755, Fabrication of optical switch arrays with auto-aligning fibers and latching micromirrors, 0000 (19 April 2002); doi: 10.1117/12.462842
Proc. SPIE 4755, Monolithic tunable InP-based vertical-cavity-surface emitting laser, 0000 (19 April 2002); doi: 10.1117/12.462843
Proc. SPIE 4755, Phase-matching pseudo-resonant tunable InP-based MOEMS, 0000 (19 April 2002); doi: 10.1117/12.462844
Proc. SPIE 4755, Large-scale metal MEMS mirror arrays with integrated electronics, 0000 (19 April 2002); doi: 10.1117/12.462845
Proc. SPIE 4755, Polysilicon surface-micromachined spatial light modulator with novel electronic integration, 0000 (19 April 2002); doi: 10.1117/12.462846
Proc. SPIE 4755, MEMS variable optical attenuator (VOA) for DWDM applications, 0000 (19 April 2002); doi: 10.1117/12.462847
Packaging and Assembly
Proc. SPIE 4755, Packaging solutions for MEMS/MOEMS using thin films as mechanical components, 0000 (19 April 2002); doi: 10.1117/12.462848
Proc. SPIE 4755, Packaging for MEMS devices: stumbling block or enabling solution?, 0000 (19 April 2002); doi: 10.1117/12.462849