PROCEEDINGS VOLUME 5145
OPTICAL METROLOGY | 23-26 JUNE 2003
Microsystems Engineering: Metrology and Inspection III
OPTICAL METROLOGY
23-26 June 2003
Munich, Germany
Interferometry for vibration analysis in MEMS
Proc. SPIE 5145, Application of microscopic interferometry techniques in the MEMS field, 0000 (3 October 2003); doi: 10.1117/12.500134
Proc. SPIE 5145, Micromotion analysis by deep-UV speckle interferometry, 0000 (3 October 2003); doi: 10.1117/12.501638
Proc. SPIE 5145, Active microelement testing by interferometry using time-average and quasi-stroboscopic techniques, 0000 (3 October 2003); doi: 10.1117/12.500747
Proc. SPIE 5145, Simultaneous mapping of phase and amplitude of MEMS vibrations by microscopic interferometry with stroboscopic illumination, 0000 (3 October 2003); doi: 10.1117/12.500138
Mechanical Characterisation and Reliability of MEMS
Proc. SPIE 5145, Interferometry system for out-of-plane microdisplacement measurement: application to mechanical expertise of scratch drive actuators, 0000 (3 October 2003); doi: 10.1117/12.502247
Proc. SPIE 5145, Mechanical characterization of thin membranes with picosecond ultrasound, 0000 (3 October 2003); doi: 10.1117/12.500464
Proc. SPIE 5145, MEMS optical switch control and integrated packaging, 0000 (3 October 2003); doi: 10.1117/12.500339
Process Monitoring and Optimisation
Proc. SPIE 5145, Interferometric measuring device with 2D analyzing for real-time and in situ plasma etching in the production of microsystem components, 0000 (3 October 2003); doi: 10.1117/12.500129
Proc. SPIE 5145, MEMS deep-RIE fabrication process and device characterization, 0000 (3 October 2003); doi: 10.1117/12.500343
Proc. SPIE 5145, Optimizing deep lithography with protons for the fabrication of 2D fiber alignment structures, 0000 (3 October 2003); doi: 10.1117/12.501255
Testing of Micro-Optical Components
Proc. SPIE 5145, Photonic bandgap crystals: a breakthrough for new-generation integrated optical device, 0000 (3 October 2003); doi: 10.1117/12.501211
Proc. SPIE 5145, Microinterferometric tomography of photonics phase elements, 0000 (3 October 2003); doi: 10.1117/12.500029
Proc. SPIE 5145, High-speed temperature measurements using novel optical-fiber-based systems, 0000 (3 October 2003); doi: 10.1117/12.499915
Proc. SPIE 5145, Detection of patch debonding in composite repaired cracked metallic specimens, using optical fibers and sensors, 0000 (3 October 2003); doi: 10.1117/12.503774
Digital Holography in Testing of Microsystems
Proc. SPIE 5145, Miniaturized sensor head for distal holographic endoscopy, 0000 (3 October 2003); doi: 10.1117/12.500404
Proc. SPIE 5145, Investigation of silicon MEMS structures subjected to thermal loading by digital holography, 0000 (3 October 2003); doi: 10.1117/12.500657
Specialised Techniques and Applications
Proc. SPIE 5145, Micro/nano moire methods, 0000 (3 October 2003); doi: 10.1117/12.500902
Proc. SPIE 5145, In-plane optical measurement of vibrations of MEMS: gradient methods using interferometry and image processing, 0000 (3 October 2003); doi: 10.1117/12.500078
Proc. SPIE 5145, Study of subpixel image processing algorithms for MEMS in-plane vibration measurements by stroboscopic microscopy, 0000 (3 October 2003); doi: 10.1117/12.500141
Proc. SPIE 5145, Ultrasonic wave propagation phenomena at material interfaces of microstructures, 0000 (3 October 2003); doi: 10.1117/12.500535
Microsensors for Testing MEMS
Proc. SPIE 5145, Integrated optomechanical sensor for in situ characterization of MEMS: the implementing of a readout architecture, 0000 (3 October 2003); doi: 10.1117/12.501463
Proc. SPIE 5145, Nanoscale displacement measurement of MEMS devices using fiber optic interferometry, 0000 (3 October 2003); doi: 10.1117/12.500435
Poster Session
Proc. SPIE 5145, Testing optical surfaces by high-precision diffractive null lenses with integrated reference surface, 0000 (3 October 2003); doi: 10.1117/12.500295
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