Kevin J. Nordquist
Research Engineer at Motorola Inc
SPIE Involvement:
Publications (29)

Proceedings Article | 15 March 2007 Paper
W. Dauksher, N. Le, K. Gehoski, E. Ainley, K. Nordquist, N. Joshi
Proceedings Volume 6517, 651714 (2007)
KEYWORDS: Semiconducting wafers, Resistance, Lithography, Scanning electron microscopy, Etching, Wafer-level optics, Particles, Optical inspection, Manufacturing, Quartz

Proceedings Article | 20 October 2006 Paper
M. Tsuneoka, T. Hasebe, T. Tokumoto, C. Yan, M. Yamamoto, D. Resnick, E. Thompson, H. Wakamori, M. Inoue, Eric Ainley, Kevin Nordquist, William Dauksher
Proceedings Volume 6349, 63492D (2006)
KEYWORDS: Inspection, Silica, Semiconducting wafers, Metals, Lithography, Scanning electron microscopy, Photomasks, Chromium, Logic, Etching

Proceedings Article | 24 March 2006 Paper
Proceedings Volume 6151, 61512K (2006)
KEYWORDS: Etching, Lithography, Oxides, Critical dimension metrology, Nanoimprint lithography, Scanning electron microscopy, Semiconducting wafers, Printing, Silicon, Plasma

Proceedings Article | 23 March 2006 Paper
S. Young, W. Dauksher, K. Nordquist, E. Ainley, K. Gehoski, A. Graupera, M. Moriarty
Proceedings Volume 6151, 61511D (2006)
KEYWORDS: Quartz, Chromium, Etching, Scanning electron microscopy, Photomasks, Atomic force microscopy, Image processing, Opacity, Semiconducting wafers, Lithography

Proceedings Article | 23 March 2006 Paper
L. Jeff Myron, Ecron Thompson, Ian McMackin, Douglas Resnick, Tadashi Kitamura, Toshiaki Hasebe, Shinichi Nakazawa, Toshifumi Tokumoto, Eric Ainley, Kevin Nordquist, William Dauksher
Proceedings Volume 6151, 61510M (2006)
KEYWORDS: Inspection, Metals, Lithography, Silica, Logic, Semiconducting wafers, Defect detection, Photomasks, Chromium, Databases

Showing 5 of 29 publications
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