Prof. Ilsin An
at Hanyang Univ
SPIE Involvement:
Publications (27)

Proceedings Article | 23 March 2010 Paper
Proceedings Volume 7636, 76362K (2010)
KEYWORDS: Surface roughness, Extreme ultraviolet lithography, Reflectivity, Photomasks, Carbon, Extreme ultraviolet, Ruthenium, Image processing, Contamination, Optical lithography

Proceedings Article | 4 March 2010 Paper
Proceedings Volume 7640, 76402E (2010)
KEYWORDS: Pellicles, Photomasks, Critical dimension metrology, Semiconducting wafers, Transmittance, Optical lithography, Laser energy, Prisms, Air contamination, Binary data

SPIE Journal Paper | 1 March 2010 Open Access
JNP, Vol. 4, Issue 01, 040302, (March 2010)
KEYWORDS: Ellipsometry, Sensors, Thin films, Gold, Optical properties, Spectroscopic ellipsometry, Crystals, Spectroscopy, Personal digital assistants, Charge-coupled devices

Proceedings Article | 1 April 2009 Paper
Sang-Kon Kim, Hye-Keun Oh, Young-Dae Jung, Ilsin An
Proceedings Volume 7273, 72730R (2009)
KEYWORDS: Lithography, Photoresist materials, Photomasks, 3D microstructuring, Polymers, Image processing, Microelectromechanical systems, Ultraviolet radiation, Photoresist processing, 3D modeling

Proceedings Article | 1 April 2009 Paper
Proceedings Volume 7273, 72732Z (2009)
KEYWORDS: Semiconducting wafers, Critical dimension metrology, Photoresist materials, Process control, Lithography, Semiconductors, Etching, Photoresist processing, Chemically amplified resists, Polymers

Showing 5 of 27 publications
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