Tanbir Hasan
Principal Architect
SPIE Involvement:
Publications (7)

Proceedings Article | 28 March 2017 Paper
Proceedings Volume 10145, 101450X (2017) https://doi.org/10.1117/12.2260024
KEYWORDS: Semiconducting wafers, Metrology, Optical lithography, Electron beam lithography, Scanners, Finite element methods, Scanning electron microscopy, Lithography, Inspection, Computational lithography

Proceedings Article | 28 March 2017 Paper
W. T. Tel, B. Segers, R. Anunciado, Y. Zhang, P. Wong, T. Hasan, C. Prentice
Proceedings Volume 10145, 101452E (2017) https://doi.org/10.1117/12.2257965
KEYWORDS: Metrology, Overlay metrology, Critical dimension metrology, Optical lithography, Scanners, Semiconductors, Semiconducting wafers, Etching, Sensors, Reticles

Proceedings Article | 24 March 2016 Paper
Proceedings Volume 9778, 97782Y (2016) https://doi.org/10.1117/12.2218859
KEYWORDS: Scanners, Metrology, Image processing, Process control, Silicon, Sensors, Overlay metrology, Inspection, Forward error correction, Electroluminescence, Visualization, Diffraction, Field emission displays

Proceedings Article | 22 March 2016 Paper
T. Hasan, Y.-S. Kang, Y.-J. Kim, S.-J. Park, S.-Y. Jang, K.-Y. Hu, E. J. Koop, P. C. Hinnen, M. M. A. Voncken
Proceedings Volume 9778, 97783G (2016) https://doi.org/10.1117/12.2219121
KEYWORDS: Semiconducting wafers, Scanners, Servomechanisms, Sensors, Optimization (mathematics), Lithography, Yield improvement, Model-based design, Control systems, Process control

Proceedings Article | 16 March 2016 Paper
Proceedings Volume 9781, 97810S (2016) https://doi.org/10.1117/12.2219143
KEYWORDS: Scanners, Design for manufacturability, Manufacturing, Product engineering, Reticles, Visualization, Image resolution, Chemical mechanical planarization, Sensors, Time metrology, Data modeling, Semiconducting wafers, Optical lithography, Performance modeling, Photomasks

Showing 5 of 7 publications
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