Mr. Yutaka Okagawa
Senior Engineer and Marketing Manager at
SPIE Involvement:
Author
Publications (9)

PROCEEDINGS ARTICLE | March 28, 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Oxides, Metrology, Logic, Statistical analysis, Etching, Germanium, Resistance, Scanning electron microscopy, 3D metrology, Process control, Critical dimension metrology, Algorithm development, Overlay metrology, Standards development, Back end of line, Fin field effect transitor

PROCEEDINGS ARTICLE | March 28, 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Semiconductors, Lithography, Optical lithography, Silica, Sensors, Scanners, Manufacturing, Scanning electron microscopy, Photomasks, Semiconductor manufacturing, Semiconducting wafers, Overlay metrology

PROCEEDINGS ARTICLE | April 27, 2016
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Wafer-level optics, Etching, Metals, Scanners, Scanning electron microscopy, Double patterning technology, Semiconducting wafers, Optics manufacturing, Overlay metrology, Tin

PROCEEDINGS ARTICLE | April 8, 2016
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Wafer-level optics, Optical lithography, Etching, Image segmentation, Scanners, Scanning electron microscopy, Semiconducting wafers, Overlay metrology, Tin, Back end of line

PROCEEDINGS ARTICLE | March 19, 2015
Proc. SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX
KEYWORDS: Diffraction, Logic, Optical lithography, Etching, Scanners, Scanning electron microscopy, Semiconducting wafers, Overlay metrology, Tin, Back end of line

SPIE Journal Paper | October 6, 2014
JM3 Vol. 13 Issue 04
KEYWORDS: Metrology, Overlay metrology, Calibration, Optical testing, Etching, Inspection, Scanning electron microscopy, Imaging metrology, Electron microscopes, Measurement devices

Showing 5 of 9 publications
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